The CCD/CMOS camera based profilers provide a 3D representation of the beam. Camera-based beam profiling systems consist of a camera and analysis software. The software includes an extensive set of ISO quantitative measurements and features a rich graphical interface, for high accuracy measurements. The advantage of camera-based beam profiling is the real-time viewing and measuring of laser beam structure. The spatial resolution of a camera sensor is an important quantity. With silicon sensors, pixel sizes well below 10um are possible, allowing to measure beam diameters down to the order of 50um. Different wavelength regions require different sensor types. Silicon-based sensors are a good choice for wavelengths in the visible and near-infrared spectral region up to roughly 1 or 1.1um.