Plasma Sources

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Plasma Sources

The EQ-10HR is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10HR high repetition rate EUV source is uniquely suited for metrology and research applications where simulation of high volume ...
  • Central Wavelength: 13.5 nm
  • Spectral Bandwidth: 0.27 nm
  • EUV Output Power (2pi Steradian): 20 W
  • Pulse Repetition Rate: 1000 - 10000 Hz
Data Sheet
The EQ-10HP is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10HP EUV source is uniquely suited for metrology and research applications. The EQ-10 series sources have become the workhorse EUV ...
  • Central Wavelength: -- nm
  • Spectral Bandwidth: -- nm
  • EUV Output Power (2pi Steradian): 20 W
  • Pulse Repetition Rate: 1200 - 2500 Hz
Data Sheet
The Laser-Driven Tunable Light Source (LDTLS™) is a compact, fully integrated and highly stable tunable broadband light source that is based on our proven Laser-Driven Light Source (LDLS™) technology. The LDTLS™ utilizes our EQ-77 LDLS™ broadband source and features the highest ...
  • Spectral Output: 300 - 1100 nm
  • Numerical Aperture: 0.39 
  • Typical Bulb Life: >9000 hrs
Data Sheet
Based on the highly successful Laser-Driven Light Source (LDLS ™) technology, the EQ-400 offers the highest radiance and irradiance available in a truly broadband white light source. The EQ-400 features a compact lamp house, with clean construction that ensures long life and ultimate stability. With a ...
  • Spectral Output: 170 - 2100 nm
  • Numerical Aperture: 0.50 
  • Typical Bulb Life: >9000 hrs
Data Sheet
Traditional calibration sources for radiometric calibration, such as Deuterium, Quartz Tungsten Halogen, and Xenonarc, all have limitations in spectral range. No one source covers the full UV-Visible range from 200nm-800nm with output at comparable levels across that spectrum. In addition, traditional sources ...
  • Spectral Output: 200 - 800 nm
  • Numerical Aperture: 0.47 
  • Typical Bulb Life: >9000 hrs
Data Sheet
Advanced imaging and analytical spectroscopy applications in the life sciences and materials sciences need light sources capable of providing extremely high brightness across broad wavelength range. Traditionally, multiple lamps (Tungsten/Halogen, Xenon-arc, Deuterium) have been used to cover this ...
  • Spectral Output: 170 - 2100 nm
  • Numerical Aperture: 0.47 
  • Typical Bulb Life: >9000 hrs
Data Sheet
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective light source, based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications. The EQ-10 has become the workhorse EUV source for the EUV community, through its proven ...
  • Central Wavelength: 13.5 nm
  • Spectral Bandwidth: .27 nm
  • EUV Output Power (2pi Steradian): 10 W
  • Pulse Repetition Rate: 1200 - 2000 Hz
Data Sheet
Energetiq has developed a revolutionary single-light source technology called the LDLS™ Laser-Driven Light Source that enables extreme high brightness with a relatively flat spectrum, from deep ultraviolet through visible into the near infrared, combined with life-time an order of magnitude longer than traditional lamps. The LDLS ...
  • Spectral Output: 170 - 2100 nm
  • Numerical Aperture: .22 
  • Typical Bulb Life: >9000 hrs
Data Sheet
Based on the highly successful Laser-Driven Light Source(LDLS) technology, the EQ-77 offers the highest radiance and irradiance available in a truly broadband white light source. The EQ-77 features a compact lamp house, with clean construction that ensures long life and ultimate stability. With a 170nm-2100nm wavelength range and a ...
  • Spectral Output: 170 - 2100 nm
  • Numerical Aperture: Up to .50 
  • Typical Bulb Life: >9000 hrs
Data Sheet