High Vacuum Motorized Vertical Stage X-VSR20A-SV2

Specifications

Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.09525 um
Built-in Controller: Yes
Travel Range: 20 mm
Accuracy (unidirectional): 35 um
Backlash: ≤ 35 um
Loaded Backlash (10 N): <10 um
Maximum Speed: 48 mm/s
Guiding Mechanism: Crossed Roller Slides
Voltage Requirement: DC 24V
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Features

  • High Vacuum Compatibility: Operates efficiently in environments up to 10-6 Torr.
  • Versatile Travel Options: Choose between 20 mm or 40 mm travel ranges.
  • Impressive Speed and Thrust: Achieves speeds up to 48 mm/s and thrusts up to 200 N.
  • Robust Load Capacity: Supports loads up to 10 kg.
  • Compact Design: Available in retracted heights of 55 mm or 85 mm.
  • Integrated Controller: Features a built-in controller that easily daisy-chains with other Zaber products.
  • Efficient Wiring: Requires only 4 feedthrough wires to control all units in the daisy-chain via serial port (with an X-PIB adaptor).
  • Plug and Play: Designed for easy setup and operation, perfect for multi-axis systems with Z-axis configurations.
  • Flexible Communication: Connects to RS-232 or USB ports and supports Zaber ASCII and Binary protocols.
  • Precision Engineering: Features a precision lead screw and ball bearing guide type for accurate motion.
  • Environmentally Compliant: RoHS and CE compliant, ensuring safety and environmental standards.
  • Durable Construction: Built to withstand operating temperatures from 0-50 °C.
  • Compact and Lightweight: Weighs only 0.560 kg, making it easy to integrate into various systems.

Applications

  • Vacuum Chamber Automation: Ideal for positioning tasks in high vacuum experimental setups.
  • Semiconductor Manufacturing: Enables precise wafer lift and positioning under vacuum conditions.
  • Optics and Photonics Alignment: Supports high-accuracy optical component positioning in research labs.
  • Material Science Research: Suitable for sample manipulation in vacuum material analysis systems.
  • Multi-Axis Motion Systems: Easily integrates as a Z-axis stage in complex automated assemblies.