Description
The Carrier.OBHL100.C is a high-performance objective scanner engineered for demanding optical and semiconductor applications. Designed with RT·Piezo motion technology and integrated into the advanced "Carrier Series," this Z-axis scanner delivers precise vertical positioning with a generous travel range of 100 µm. The system achieves sub-nanometer closed-loop resolution (as fine as 0.3 nm) using a high-precision capacitive sensor, ensuring excellent stability and accuracy during auto-focus operations.
With a rapid settling time of 10 ms and compatibility with the MC-Archimedes Series motion controller, the Carrier.OBHL100.C guarantees fast and reliable performance. This scanner supports specialized environments with optional versions for non-magnetic (.NM), high vacuum (.HV), and ultra-high vacuum (.UHV) applications, making it versatile for use in cleanrooms, vacuum chambers, and sensitive research facilities.
Its robust construction—featuring stainless steel 304 and aluminum alloy—enables the scanner to carry loads up to 500 g while maintaining excellent dynamic characteristics. With resonance frequencies up to 900 Hz unloaded, it is optimized for precision optics, semiconductor inspection, and real-time imaging systems.
Carrier.OBHL100.C Scanning Motion Vertical Piezoelectric Stage
Specifications
| Load Capacity: | 0.5 kg |
|---|---|
| Vacuum Compatible: | Yes |
| Microstep Size (default Resolution): | 0.0001 um |
| Built-in Controller: | Yes |
| Travel Range: | 0.1 mm |
| Accuracy (unidirectional): | 0.001 um |
| Backlash: | ≤5 um |
| Loaded Backlash (10 N): | Not Specified |
| Maximum Speed: | 10 mm/s |
| Weight: | 0.5 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Resolution (close Loop): | 0.3 nm |
| Resolution (open Loop): | 0.1 nm |
| 8 Resonance Frequency (unloaded): | 900 Hz |
| Resonance Frequency (150 G-loaded): | 500 Hz |
| Direction Of Motion: | Z-axis |
| Closed-Loop Resolution: | 0.3 nm |
| Open-Loop Resolution: | 0.1 nm |
| Settling Time (90%): | 10 ms |
| Main Body Material: | Stainless Steel 304, Aluminum Alloy |
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Features
- 100 µm Z-Axis Travel Range: Extended vertical motion for detailed scanning
- Ultra-Fast Response: 10 ms (90%) settling time for real-time positioning
- High Resolution: Closed-loop resolution as low as 0.3 nm for precise control
- Capacitive Sensor Feedback: Ensures ultra-stable motion and linearity
- Versatile Environment Support: Available ,. HV, and. UHV configurations
- High Load Capacity: Supports up to 500 g, ideal for heavy objectives or setups
- Rugged Build: Constructed with stainless steel and aluminum alloy for durability
Applications
- Semiconductor Characterization: Precision alignment and scanning for wafer inspection
- Automated Optical Systems: Auto-focus platforms in research and industry
- High-Resolution Imaging: Enhances clarity and depth in advanced microscopy
- Laser Processing & Measurement: Stable motion for micro-machining and diagnostics
- Vacuum-Based Research: Suitable for UHV/cleanroom applications in nanotech and photonics
Frequently Asked Questions
What applications is the Carrier.OBHL100.C scanner best suited for?
Can the scanner be used in high vacuum or ultra-high vacuum environments?
What is the resolution capability of this scanner?
What load capacity can the Carrier.OBHL100.C handle?
What controller is compatible with this objective scanner?
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