Thumbnail of Carrier.OBHL100.C Scanning Motion Vertical Piezoelectric Stage photo 1

Description

The Carrier.OBHL100.C is a high-performance objective scanner engineered for demanding optical and semiconductor applications. Designed with RT·Piezo motion technology and integrated into the advanced "Carrier Series," this Z-axis scanner delivers precise vertical positioning with a generous travel range of 100 µm. The system achieves sub-nanometer closed-loop resolution (as fine as 0.3 nm) using a high-precision capacitive sensor, ensuring excellent stability and accuracy during auto-focus operations.

With a rapid settling time of 10 ms and compatibility with the MC-Archimedes Series motion controller, the Carrier.OBHL100.C guarantees fast and reliable performance. This scanner supports specialized environments with optional versions for non-magnetic (.NM), high vacuum (.HV), and ultra-high vacuum (.UHV) applications, making it versatile for use in cleanrooms, vacuum chambers, and sensitive research facilities.

Its robust construction—featuring stainless steel 304 and aluminum alloy—enables the scanner to carry loads up to 500 g while maintaining excellent dynamic characteristics. With resonance frequencies up to 900 Hz unloaded, it is optimized for precision optics, semiconductor inspection, and real-time imaging systems.

Carrier.OBHL100.C Scanning Motion Vertical Piezoelectric Stage

Visit the Zolix Instruments CO.,LTD Store

Specifications

Load Capacity: 0.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.0001 um
Built-in Controller: Yes
Travel Range: 0.1 mm
Accuracy (unidirectional): 0.001 um
Backlash: ≤5 um
Loaded Backlash (10 N): Not Specified
Maximum Speed: 10 mm/s
Weight: 0.5 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Resolution (close Loop): 0.3 nm
Resolution (open Loop): 0.1 nm
8 Resonance Frequency (unloaded): 900 Hz
Resonance Frequency (150 G-loaded): 500 Hz
Direction Of Motion: Z-axis
Closed-Loop Resolution: 0.3 nm
Open-Loop Resolution: 0.1 nm
Settling Time (90%): 10 ms
Main Body Material: Stainless Steel 304, Aluminum Alloy

Got questions about specs? Use the inquiry form to ask.

Document icon Download Data Sheet Download icon

Features

  • 100 µm Z-Axis Travel Range: Extended vertical motion for detailed scanning
  • Ultra-Fast Response: 10 ms (90%) settling time for real-time positioning
  • High Resolution: Closed-loop resolution as low as 0.3 nm for precise control
  • Capacitive Sensor Feedback: Ensures ultra-stable motion and linearity
  • Versatile Environment Support: Available ,. HV, and. UHV configurations
  • High Load Capacity: Supports up to 500 g, ideal for heavy objectives or setups
  • Rugged Build: Constructed with stainless steel and aluminum alloy for durability

Applications

  • Semiconductor Characterization: Precision alignment and scanning for wafer inspection
  • Automated Optical Systems: Auto-focus platforms in research and industry
  • High-Resolution Imaging: Enhances clarity and depth in advanced microscopy
  • Laser Processing & Measurement: Stable motion for micro-machining and diagnostics
  • Vacuum-Based Research: Suitable for UHV/cleanroom applications in nanotech and photonics

Frequently Asked Questions

What applications is the Carrier.OBHL100.C scanner best suited for?
The Carrier.OBHL100.C is ideal for high-precision Z-axis motion in applications such as semiconductor inspection, auto-focus systems in optical instruments, laser processing, and vacuum-based scientific research. Its ultra-fine resolution and fast response time make it especially suitable for microscopy and nanotechnology.
Can the scanner be used in high vacuum or ultra-high vacuum environments?
Yes, the Carrier.OBHL100.C is available in versions that support non-magnetic, high vacuum (.HV), and ultra-high vacuum (.UHV) environments. These options ensure the device can be integrated into sensitive experimental setups that demand vacuum compatibility and material purity.
What is the resolution capability of this scanner?
The scanner offers a closed-loop resolution of 0.3 nanometers and an open-loop resolution of 0.1 nanometers. This level of precision enables extremely accurate positioning, which is crucial for high-resolution imaging and other demanding scientific applications.
What load capacity can the Carrier.OBHL100.C handle?
It supports a maximum load of 500 grams, making it capable of accommodating heavier objectives and optical components without compromising performance or speed.
What controller is compatible with this objective scanner?
The Carrier.OBHL100.C is designed to operate with the MC-Archimedes Series motion controller. This controller ensures smooth integration and precise management of motion parameters, including speed, position, and real-time feedback.

Got more questions? Use the inquiry form to ask the supplier directly.

Similar Products

Request Quote