Description
The Carrier.HS100.xy.C is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The Carrier.HS100.xy.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
Carrier.HS100.xy.C High Load XY Scanner | Large Aperture, Parallel Kinematics, Capacitive Senser
Specifications
| Load Capacity: | 3.5 kg |
|---|---|
| Vacuum Compatible: | Yes |
| Microstep Size (default Resolution): | 0.001 um |
| Built-in Controller: | Not Specified |
| Travel Range: | 0.1 mm |
| Accuracy (unidirectional): | Not Specified |
| Backlash: | ≤5 um |
| Loaded Backlash (10 N): | Not Specified |
| Maximum Speed: | Not Specified |
| Weight: | 1 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Rigidity: | 2 N/ um |
Download Data Sheet
Features
- Travel range in XY: 100 um
- Close loop resolution < 1nm
- Max Load 3.5 kg
- For microscopy: super resolution solutions
- Non-magnetic (.NM) and ultra- high vacuum (.UHV) optional
Applications
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
- Work in a glove box
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