Thumbnail of Carrier.S100.xyRz.C High Load Piezoelectric Stage | High Speed, XYRz, 3-axis photo 1

Description

The Carrier.S100.xyRz.Cis a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. 

The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The Carrier.S100.xyRz.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.

Carrier.S100.xyRz.C High Load Piezoelectric Stage | High Speed, XYRz, 3-axis

Visit the Zolix Instruments CO.,LTD Store

Specifications

Load Capacity: 3.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.001 um
Built-in Controller: No
Travel Range: 0.1 mm
Accuracy (unidirectional): Not Specified
Backlash: Other
Loaded Backlash (10 N): Not Specified
Maximum Speed: Not Specified
Weight: 1 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Operating Temperature Range: 15-40 °C

Got questions about specs? Use the inquiry form to ask.

Document icon Download Data Sheet Download icon

Features

  • Travel range in XY: 100 um, θz: 1mrad
  • Close loop resolution < 1nm
  • Max Load 3.5 kg
  • For microscopy: super resolution solutions
  • Non-magnetic (.NM) & ultra- high vacuum (.UHV) optional

Applications

  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems
  • Work in a glove box

Similar Products

Request Quote