Description
The Carrier.S100.xyRz.Cis a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The Carrier.S100.xyRz.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
Carrier.S100.xyRz.C High Load Piezoelectric Stage | High Speed, XYRz, 3-axis
Specifications
| Load Capacity: | 3.5 kg |
|---|---|
| Vacuum Compatible: | Yes |
| Microstep Size (default Resolution): | 0.001 um |
| Built-in Controller: | No |
| Travel Range: | 0.1 mm |
| Accuracy (unidirectional): | Not Specified |
| Backlash: | Other |
| Loaded Backlash (10 N): | Not Specified |
| Maximum Speed: | Not Specified |
| Weight: | 1 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Operating Temperature Range: | 15-40 °C |
Download Data Sheet
Features
- Travel range in XY: 100 um, θz: 1mrad
- Close loop resolution < 1nm
- Max Load 3.5 kg
- For microscopy: super resolution solutions
- Non-magnetic (.NM) & ultra- high vacuum (.UHV) optional
Applications
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
- Work in a glove box
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