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Description

The Carrier.HS100.zTxTy.C is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. 

The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The Carrier.HS100.zTxTy.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.

Carrier.HS100.zTxTy.C RT Piezo Scanning Solution | High Load - Z and Tip/Tilt Stage with 3 Axes

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Specifications

Load Capacity: 2.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): Not Specified
Built-in Controller: No
Travel Range: 0.1 mm
Accuracy (unidirectional): Not Specified
Backlash: ≤5 um
Loaded Backlash (10 N): Not Specified
Maximum Speed: Not Specified
Weight: 1 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Operating Temperature Range: 15-40 °C

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Features

  • Non-magnetic (.NM）& ultra- high vacuum (.UHV) optional
  • Z, θx, θy scanning motion
  • 100 um travel range, 1 mrad & 1 mrad
  • Close loop resolution: < 1 nm
  • Max Load 5 kg
  • For microscopy: super resolution solutions

Applications

  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems
  • Work in a glove box

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