Carrier.HS100.zTxTy.C RT Piezo Scanning Solution | High Load - Z and Tip/Tilt Stage with 3 Axes

Specifications

Load Capacity: 2.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): Not Specified
Built-in Controller: No
Travel Range: 0.1 mm
Accuracy (unidirectional): Not Specified
Backlash: ≤5 um
Loaded Backlash (10 N): Not Specified
Maximum Speed: Not Specified
Weight: 1 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Operating Temperature Range: 15-40 °C
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Features


  • Non-magnetic (.NM)& ultra- high vacuum (.UHV) optional

  • Z, θx, θy scanning motion

  • 100 um travel range, 1 mrad & 1 mrad

  • Close loop resolution: < 1 nm

  • Max Load 5 kg

  • For microscopy: super resolution solutions

Applications


  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems

  • Work in a glove box