Carrier.OB100.C - Scanning Motion Vertical Piezoelectric Stage

Specifications

Load Capacity: 0.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.001 um
Built-in Controller: Yes
Travel Range: 0.1 mm
Accuracy (unidirectional): 0.001 um
Backlash: ≤5 um
Loaded Backlash (10 N): <10 um
Maximum Speed: 15 mm/s
Weight: 0.27 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Resolution (close Loop): 1 nm
Resolution (open Loop): 0.2 nm
Resonance Frequency (unloaded): 500 Hz
Direction Of Movement: Z-axis
Closed-Loop Resolution: < 1 nm
Open-Loop Resolution: 0.2 nm
Main Body Materials: Stainless Steel 304, Aluminum Alloy
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Features

  • Extended Z-Axis Travel: Offers 100 µm vertical motion with nanometer-level precision
  • Closed-Loop Resolution < 1 nm: Enables ultra-fine focus adjustments using capacitive sensing
  • Fast Settling Time: Achieves full stabilization in just 15 ms (90% response)
  • High Load Capacity: Supports up to 500 g without loss of performance
  • Vacuum & Magnetic Compatibility: Optional versions available for UHV, HV, and non-magnetic applications
  • Durable Build: Made from stainless steel 304 and aluminum alloy for robustness
  • High Resonance Frequency: 500 Hz unloaded, ensuring responsive motion control

Applications

  • Automated Microscopy Systems: Enables precise autofocusing and Z-stack imaging
  • High-Resolution Optical Inspection: Ideal for use in semiconductor and materials testing
  • Laser Scanning and Metrology: Provides nanometer control for precise vertical positioning
  • Biomedical Imaging Systems: Supports stable imaging in cellular and tissue analysis
  • Vacuum-Compatible Research Tools: Optional. HV and. UHV models suitable for cleanroom and cryogenic setups