Carrier.S200.xy /xyz.C Linear Stagge | High Speed Capacitive Sensor, High Resolution

Specifications

Load Capacity: 0.5 kg
Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.002 um
Built-in Controller: No
Travel Range: 0.2 mm
Accuracy (unidirectional): Not Specified
Backlash: ≤5 um
Loaded Backlash (10 N): Not Specified
Maximum Speed: Not Specified
Weight: 1 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Repeatability: ± 20 nm
Max Operating Voltage: Max. 150 V
Motion Direction: XY (S200.xy)
Capacitive Sensor: Integrated (Closed Loop)
Operating Voltage Max.: 150 V
Operating Temperature: +15 to +40
Effective Through-Hole Size: 77 × 65 mm
Materials: Aluminum Alloy & Stainless Steel
Dimensions (L × W × H): 182 × 150 × 15 mm
Mount Compatibility: Carrier.L7550.XY
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Features


  • Travel Range: Up to 200 µm in X, Y, and Z directions (XYZ model)

  • High Resolution: Closed-loop resolution under 2 nm for precise control

  • Capacitive Feedback: Ensures accurate real-time positioning

  • Vacuum Compatibility: Available in non-magnetic (.NM) and UHV-compatible (.UHV) versions

  • Robust Design: Durable aluminum alloy and stainless steel construction

  • Large Aperture: 77 mm × 65 mm effective through-hole

  • Compact Footprint: Slim 15 mm height with 1 kg total weight

Applications


  • Super-Resolution Microscopy: Enhances imaging with sub-nanometer precision

  • Nanopositioning Systems: Ideal for applications requiring highly accurate XY/XYZ motion

  • Semiconductor Inspection: Enables fine adjustments in component alignment and measurement

  • Optical Metrology: Supports high-speed scanning in precision environments

  • Life Sciences: Facilitates biological imaging and sample manipulation under microscopes