High Vacuum Motorized Linear Stage X-LRQ600BL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 600 mm
Load Capacity: 100 kg
Maximum Speed: 205 mm/s
Maximum Current Draw: 1200 mA
Minimum Speed: 0.000303 mm/s
Speed Resolution: 0.000303 mm/s
Vertical Runout: < 210 µm
Horizontal Runout: < 77 µm
Motor Rated Current: 2100 mA/phase
Inductance: 2.8 mH/phase
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Features


  • Vacuum Compatibility: Suitable for high vacuum environments up to 10-6 Torr.

  • Travel Range Options: Available in 75, 150, 300, 450, and 600 mm travel ranges.

  • High Load Capacity: Supports loads up to 100 kg.

  • Fast and Powerful: Achieves speeds up to 205 mm/s with a thrust capacity of up to 100 N.

  • Integrated Controller: Features a built-in controller for seamless operation.

  • Daisy-Chain Capability: Can be daisy-chained with other Zaber products, requiring only four feedthrough wires via serial port using an X-PIB adaptor.

  • Compact Design: With a low profile of only 36 mm, ideal for applications requiring minimal height.

  • Easy Connectivity: Connects to RS-232 or USB ports, sharing power with multiple X-Series products for efficient power management.

  • Precision and Accuracy: Offers a microstep size of 0.49609375 µm and unidirectional accuracy of 90 µm.

  • Repeatability and Backlash: Ensures repeatability of < 2.5 µm and backlash of < 21 µm.

  • Robust Construction: Features a recirculating ball linear guide for durability and smooth operation.

  • Versatile Integration: Can be bolted together into an XY system for expanded motion control applications.

  • Temperature Resilience: Designed to operate effectively across a wide temperature range.

  • Advanced Motion Control: Equipped with a stepper motor and precision lead screw for high-performance linear motion.

  • Magnetic Home Sensor: Includes a magnetic home sensor for accurate positioning.

Applications


  • Semiconductor Manufacturing: Precision positioning in high vacuum wafer processing systems.

  • Vacuum Automation Systems: Reliable actuation for vacuum-compatible automation equipment.

  • Research Laboratories: Ideal for beamline, synchrotron, and microscopy applications in vacuum.

  • Optical Alignment: Accurate motion control for aligning optical components in vacuum environments.

  • Material Science Experiments: Enables precise sample manipulation under controlled vacuum conditions.