High Vacuum Motorized Linear Stage X-LSM150A-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 152.4 mm
Load Capacity: 10 kg
Maximum Speed: 24 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.047625 µm
Accuracy (unidirectional): 46 µm
Vertical Runout: < 8 µm
Horizontal Runout: < 12 µm
Maximum Current Draw: 350 mA
Motor Rated Current: 800 mA/phase
Inductance: 3.5 mH/phase
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Features


  • Vacuum Compatibility: Suitable for environments with vacuum levels up to 10-6 Torr.

  • Travel Options: Available in 25, 50, 100, 150, and 200 mm travel ranges.

  • Load Capacity: Supports up to 10 kg of load.

  • Speed and Thrust: Capable of speeds up to 100 mm/s and thrusts up to 35 N.

  • Built-in Controller: Integrated controller allows for easy daisy-chaining with other Zaber products.

  • Minimal Wiring: Requires only 4 feedthrough wires for control via serial port with an X-PIB adaptor.

  • Compact Design: At only 21 mm high, it is ideal for applications requiring a small profile.

  • Power Supply: Operates with a standard 24 V or 48 V power supply.

  • Connectivity: Connects to RS-232 or USB ports, facilitating integration with computer systems.

  • Shared Power: Daisy-chain configuration allows multiple devices to share a single power supply.

  • Precision and Accuracy: Offers a microstep size of 0.047625 µm and unidirectional accuracy of 46 µm.

  • Repeatability: Less than 1 µm, ensuring consistent performance.

  • Low Backlash: Backlash is under 3 µm, enhancing precision.

  • Speed Resolution: As fine as 0.000029 mm/s for precise control.

  • Durability: Constructed with vacuum-compatible materials to minimize outgassing and reduce pump down times.

  • Guide Type: Features a needle roller bearing for smooth motion.

  • Mechanical Drive System: Uses a precision lead screw for reliable operation.

  • Motor Type: Equipped with a stepper motor (2 phase) for accurate positioning.

Applications


  • Vacuum Motion Control: Ideal for linear positioning tasks in high vacuum environments for research and development.

  • Precision Automation Systems: Enhances automated inspection, assembly, and alignment processes with reliable micro-positioning.

  • Optical Alignment: Suitable for precise alignment of optics within vacuum chambers.

  • Semiconductor and Material Science: Supports wafer positioning and materials analysis under vacuum conditions.

  • Multi-Axis Motion Systems: Easily integrates into complex setups with other Zaber stages for synchronized motion control.