High Vacuum Motorized Linear Stage X-LSM100B-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 25, 50, 100, 150, 200 mm
Load Capacity: 10 kg
Maximum Speed: 100 mm/s
Microstep Size: 0.1905 µm
Vertical Runout: < 8 µm
Horizontal Runout: < 12 µm
Maximum Current Draw: 350 mA
Power Supply: 24-48 VDC
Motor Rated Current: 800 mA/phase
Inductance: 3.5 mH/phase
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Features


  • Vacuum Compatibility: Compatible with vacuum environments up to 10-6 Torr.

  • Travel Range Options: Available in 25, 50, 100, 150, and 200 mm travel options.

  • Load Capacity: Supports loads up to 10 kg.

  • Speed and Thrust: Achieves speeds up to 100 mm/s and thrusts up to 35 N.

  • Built-in Controller: Features an integrated controller that allows for easy daisy-chaining with other Zaber products.

  • Minimal Wiring: Requires only four feedthrough wires for full control of all units in a daisy-chain via a serial port (with an X-PIB adaptor).

  • Compact Design: At just 21 mm high, the stage is ideal for applications needing a small profile.

  • Power Efficiency: Daisy-chaining shares power, allowing multiple X-Series products to use a single power supply.

  • Easy Setup: Designed for 'plug and play' operation, simplifying installation and use.

  • High Precision: Offers a microstep size of 0.1905 µm with a travel range of 101.6 mm (4 inches).

  • Accuracy and Repeatability: Unidirectional accuracy of 30 µm and repeatability of less than 4 µm.

  • Communication Interface: Connects via RS-232 with support for Zaber ASCII and Zaber Binary protocols.

  • Robust Mechanical Design: Utilizes a precision lead screw drive system and needle roller bearing guide type.

  • Power Requirements: Operates on a 24-48 VDC power supply.

  • Stepper Motor: Equipped with a 2-phase stepper motor rated at 800 mA/phase.

  • Durable Materials: Constructed with vacuum-compatible materials to minimize outgassing.

Applications


  • Vacuum Chamber Automation: Ideal for positioning and motion tasks in high vacuum experimental setups.

  • Semiconductor Manufacturing: Suitable for wafer inspection and precise component alignment in vacuum environments.

  • Optical Systems Alignment: Provides accurate linear motion for lens or mirror positioning within compact optical setups.

  • Research Laboratories: Enables flexible automation for materials science, physics, and surface analysis experiments.

  • Integration with Zaber Systems: Designed to work seamlessly with other Zaber devices for multi-axis motion solutions.