High Vacuum Motorized Linear Stage X-LRQ450BL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 450 mm
Load Capacity: 100 kg
Maximum Speed: 205 mm/s
Power Supply: 24-48 VDC
Minimum Speed: 0.000303 mm/s
Speed Resolution: 0.000303 mm/s
Communication Interface: RS-232
Vertical Runout: < 200 µm
Horizontal Runout: < 62 µm
Maximum Current Draw: 1200 mA
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Features

  • Vacuum Compatibility: Designed for high vacuum environments, compatible up to 10-6 Torr.
  • Travel Range Options: Available in 75, 150, 300, 450, and 600 mm travel ranges to suit diverse application needs.
  • High Load Capacity: Supports loads up to 100 kg, making it suitable for heavy-duty applications.
  • Fast and Powerful: Achieves speeds up to 205 mm/s and thrusts up to 100 N for efficient motion control.
  • Built-in Controller: Comes with an integrated controller and can be easily daisy-chained with other Zaber products.
  • Minimal Wiring: Requires only four feedthrough wires to control all units in the daisy-chain via a serial port (with an X-PIB adaptor).
  • Compact Design: At only 36 mm high, it is ideal for applications requiring a low profile.
  • Plug and Play: Easy to set up and operate, designed for straightforward integration into existing systems.
  • Flexible Connectivity: Connects to RS-232 or USB ports and shares power across daisy-chained devices.
  • Precision and Accuracy: Features a microstep size of 0.49609375 µm, unidirectional accuracy of 60 µm, and repeatability of < 2.5 µm.
  • Durable and Reliable: Built with a recirculating ball linear guide for enhanced longevity and performance.
  • Magnetic Home Sensor: Includes a magnetic home sensor for easy reference and positioning.
  • Stepper Motor: Equipped with a 2-phase stepper motor for precise control.
  • Wide Operating Temperature Range: Suitable for various environments, ensuring versatility in application.

Applications

  • Vacuum Environment Compatibility: Designed for use in high-vacuum systems up to 10⁻⁶ Torr.
  • Semiconductor Fabrication: Ideal for precise motion control in semiconductor manufacturing processes.
  • Optical and Metrology Instruments: Provides smooth, repeatable linear positioning for measurement systems.
  • Scientific Research: Suitable for laboratory setups requiring compact, vacuum-compatible stages.
  • Multi-Axis Systems: Can be combined into XY configurations for complex automation and testing tasks.