High Vacuum Motorized Linear Stage X-LSM200A-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Travel Range: 25, 50, 100, 150, 200 mm
Load Capacity: 10 kg
Maximum Speed: 100 mm/s
Power Supply: 24-48 VDC
Microstep Size (Default Resolution): 0.047625 µm
Travel Range: 203.2 mm
Repeatability: < 1 µm
Minimum Speed: 0.000029 mm/s
Speed Resolution: 0.000029 mm/s
Vertical Runout: < 8 µm
Horizontal Runout: < 12 µm
Linear Motion Per Motor Rev: 0.6096 mm
Motor Steps Per Rev: 200
Motor Rated Current: 800 mA/phase
Inductance: 3.5 mH/phase
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Features


  • Vacuum Compatibility: Suitable for environments up to 10-6 Torr.

  • Travel Options: Available in 25, 50, 100, 150, and 200 mm travel ranges.

  • Load Capacity: Can handle loads up to 10 kg.

  • Performance: Achieves speeds up to 100 mm/s and thrust up to 35 N.

  • Integrated Controller: Features a built-in controller for seamless operation.

  • Daisy-Chain Capability: Easily daisy-chains with other Zaber products using only 4 feedthrough wires via serial port (with X-PIB adaptor).

  • Compact Design: At just 21 mm high, ideal for applications requiring a small profile.

  • Plug and Play: Designed for easy setup and operation with minimal outgassing for faster pump down times.

  • Connectivity: Connects to RS-232 or USB ports; daisy-chain shares power for multiple units.

  • Precision: Offers a microstep size of 0.047625 µm and repeatability of less than 1 µm.

  • Durability: Constructed with vacuum-compatible materials and needle roller bearings for stability.

  • Power Requirements: Operates with a standard 24 V or 48 V power supply.

  • Communication: Supports Zaber ASCII and Zaber Binary protocols.

  • Mechanical Drive System: Precision lead screw for accurate linear motion.

Applications


  • Vacuum Research Systems: Ideal for precise positioning in vacuum chambers.

  • Semiconductor Manufacturing: Enables accurate wafer alignment under vacuum conditions.

  • Scientific Instrumentation: Supports high-precision motion in optical and analytical devices.

  • Automated Testing: Suitable for integration in automated vacuum test setups.
    Material Science: Facilitates controlled sample positioning in vacuum environments.