High Vacuum Motorized Linear Stage X-LRQ600AL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 75, 150, 300, 450, 600 mm
Load Capacity: 100 kg
Maximum Speed: 205 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.09921875 µm
Minimum Speed: 0.000061 mm/s
Speed Resolution: 0.000061 mm/s
Communication Interface: RS-232
Vertical Runout: < 210 µm
Horizontal Runout: < 77 µm
Maximum Current Draw: 1200 mA
Motor Rated Current: 2100 mA/phase
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Features


  • Vacuum Compatibility: Designed for high vacuum environments, compatible up to 10-6 Torr.

  • Travel Options: Available in 75, 150, 300, 450, and 600 mm travel lengths.

  • Load Capacity: Supports loads up to 100 kg.

  • Speed and Thrust: Achieves speeds up to 205 mm/s and provides up to 100 N thrust.

  • Built-in Controller: Comes with an integrated controller; can be daisy-chained with other Zaber products.

  • Efficient Wiring: Requires only 4 feedthrough wires to control all units in the daisy-chain via serial port (with an X-PIB adaptor).

  • Compact Design: Stands at only 36 mm high, ideal for applications requiring a low profile.

  • Connectivity: Connects to RS-232 or USB ports and shares power in daisy-chain configurations.

  • Plug and Play: Easy to set up and operate, designed for seamless integration.

  • Precision and Accuracy: Offers a microstep size of 0.09921875 µm with unidirectional accuracy of 150 µm and repeatability of < 2.5 µm.

  • Versatile Mounting: Features M6 and M3 threaded holes for flexible mounting options.

  • Durable Build: Equipped with recirculating ball linear guides for high stiffness and longevity.

  • Temperature Range: Operates efficiently across a wide temperature range.

Applications


  • Vacuum Chamber Automation: Reliable positioning for components in semiconductor fabrication and analysis.

  • Metrology Systems: Ensures precise linear motion for measurement and inspection equipment.

  • Optics Alignment: Facilitates stable optical component positioning in vacuum environments.

  • Scientific Research: Ideal for experiments requiring high precision under vacuum conditions.

  • XY Motion Systems: Easily integrates into multi-axis configurations for complex motion requirements.