High Vacuum Motorized Linear Stage X-LRQ150AL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 75, 150, 300, 450, 600 mm
Load Capacity: 100 kg
Maximum Speed: 205 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.09921875 µm
Minimum Speed: 0.000061 mm/s
Speed Resolution: 0.000061 mm/s
Guide Type: Recirculating Ball Linear Guide
Vertical Runout: < 190 µm
Horizontal Runout: < 31 µm
Maximum Current Draw: 1200 mA
Motor Rated Current: 2100 mA/phase
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Features


  • Vacuum Compatibility: Suitable for high vacuum environments up to 10-6 Torr.

  • Versatile Travel Options: Available in 75, 150, 300, 450, and 600 mm travel ranges.

  • Robust Load Capacity: Supports loads up to 100 kg.

  • High Speed and Thrust: Achieves speeds up to 205 mm/s and thrust up to 100 N.

  • Integrated Controller: Comes with a built-in controller that can daisy-chain with other Zaber products.

  • Efficient Wiring: Requires only 4 feedthrough wires to control all daisy-chained units via serial port (with an X-PIB adaptor).

  • Compact Design: At only 36 mm high, ideal for applications needing a low profile.

  • Easy Connectivity: Connects to RS-232 or USB ports and shares power across multiple units.

  • Precision and Accuracy: Features a microstep size of 0.09921875 µm, unidirectional accuracy of 45 µm, and repeatability of < 2.5 µm.

  • Durable Construction: Uses a recirculating ball linear guide for enhanced performance.

  • Advanced Motion Control: Maximum centered load of 1000 N and cantilever load up to 3000 N•cm.

  • Temperature Resilience: Operates efficiently across a wide temperature range.

  • Plug and Play: Designed for easy setup and operation, compatible with Zaber's 'plug and play' system.

  • Power Specifications: Operates with a 24-48 VDC power supply, with a maximum current draw of 1200 mA.

  • Motor Specifications: Equipped with a 2-phase stepper motor with 2100 mA/phase rated current and 2.8 mH/phase inductance.

  • Mounting Flexibility: Features M6 and M3 threaded holes for versatile mounting options.

  • Home Sensing: Includes a magnetic home sensor for precise positioning.

Applications


  • Vacuum Automation Systems: Ideal for precise positioning in high-vacuum chambers

  • Semiconductor Manufacturing: Supports wafer inspection and lithography alignment

  • Optical Alignment: Enables stable and repeatable motion for optics setups in research

  • Metrology and Inspection: Provides accurate linear motion for measurement systems

  • Laboratory Research: Integrates into experimental setups requiring clean and vacuum-compatible motion control