High Vacuum Motorized Linear Stage X-LRQ075BL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 75, 150, 300, 450, 600 mm
Load Capacity: 100 kg
Speed: 205 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.49609375 µm
Maximum Speed: 205 mm/s
Minimum Speed: 0.000303 mm/s
Speed Resolution: 0.000303 mm/s
Communication Interface: RS-232
Communication Protocol: Zaber ASCII, Zaber Binary
Guide Type: Recirculating Ball Linear Guide
Vertical Runout: < 190 µm
Horizontal Runout: < 31 µm
Motor Rated Current: 2100 mA/phase
Inductance: 2.8 mH/phase
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Features


  • Vacuum Compatibility: High vacuum compatible up to 10-6 Torr, ideal for specialized applications.

  • Travel Range Options: Available in 75, 150, 300, 450, and 600 mm travel ranges to suit various needs.

  • Impressive Load Capacity: Supports up to 100 kg load capacity, ensuring robust performance.

  • High Speed and Thrust: Achieves speeds up to 205 mm/s and thrust up to 100 N, enhancing productivity.

  • Built-in Controller: Features an integrated controller, allowing easy daisy-chaining with other Zaber products.

  • Minimal Wiring: Only 4 feedthrough wires required for control via serial port, simplifying setup.

  • Compact Design: At just 36 mm high, these stages are perfect for low-profile applications.

  • Easy Connectivity: Connects to RS-232 or USB ports, enabling seamless integration with computers.

  • Power Sharing: Daisy-chain shares power, allowing multiple X-Series products to use a single power supply.

  • Precision and Accuracy: Offers a microstep size of 0.49609375 µm and unidirectional accuracy of 15 µm.

  • Reliable Repeatability: Ensures repeatability of less than 2.5 µm for consistent performance.

  • Durable Construction: Built with a recirculating ball linear guide for long-lasting reliability.

  • Versatile Mounting: Features M6 and M3 threaded holes for easy installation.

  • Advanced Motion Control: Magnetic home sensor and precision lead screw drive system for optimal control.

  • Wide Operating Temperature Range: Designed to perform in diverse environments.

Applications


  • Vacuum Semiconductor Manufacturing: Ideal for wafer positioning and microfabrication in vacuum chambers.

  • Optical Alignment Systems: Provides precise linear positioning for optics within vacuum setups.

  • Research Laboratories: Enables accurate sample or detector positioning in high-vacuum experiments.

  • Automated Assembly in Vacuum: Supports motion automation in vacuum-based assembly lines.

  • XY Stage Configurations: Easily combines with other X-LRQ stages for multi-axis vacuum applications.