High Vacuum Motorized Linear Stage X-LRQ075AL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 75, 150, 300, 450, 600 mm
Load Capacity: 100 kg
Speed: Up to 205 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.09921875 µm
Minimum Speed: 0.000061 mm/s
Speed Resolution: 0.000061 mm/s
Communication Interface: RS-232
Vertical Runout: < 190 µm
Horizontal Runout: < 31 µm
Pitch: 0.034°
Roll: 0.015°
Yaw: 0.044°
Maximum Current Draw: 1200 mA
Motor Rated Current: 2100 mA/phase
Inductance: 2.8 mH/phase
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Features


  • Vacuum Compatibility: Designed for high-vacuum environments up to 10-6 Torr.

  • Travel Options: Available in 75, 150, 300, 450, and 600 mm travel lengths.

  • Load Capacity: Capable of supporting loads up to 100 kg.

  • High Speed and Thrust: Achieves speeds up to 205 mm/s and thrusts up to 100 N.

  • Built-in Controller: Integrated controller allows for easy daisy-chaining with other Zaber products.

  • Minimal Wiring: Requires only 4 feedthrough wires to control all units in a daisy-chain via serial port (with an X-PIB adaptor).

  • Compact Design: With a height of just 36 mm, ideal for low-profile applications.

  • Plug and Play: Easy setup and operation with standard 24 V or 48 V power supply.

  • Versatile Connectivity: Connects via RS-232 or USB ports and can share power in a daisy-chain configuration.

  • Precision and Accuracy: Features microstep size of 0.09921875 µm, unidirectional accuracy of 23 µm, and repeatability of < 2.5 µm.

  • Robust Mechanical Design: Utilizes a precision lead screw and recirculating ball linear guide for smooth motion.

  • Advanced Sensing and Interface: Includes magnetic home sensor and supports Zaber ASCII and Binary communication protocols.

Applications


  • Vacuum Motion Systems: Ideal for high-vacuum positioning in scientific instruments and chambers.

  • Automated XY Platforms: Combines with other stages for multi-axis precision motion.

  • Research and Development Labs: Enables accurate sample manipulation under vacuum conditions.

  • Optical Alignment Systems: Ensures stable and precise positioning for optical components.

  • Semiconductor and Material Testing: Supports high-load sample movement in vacuum testing setups.