QNP3-100XYAZ-030-10 Three-Axis, Parallel Kinematic, XYZ Piezo Nanopositioning Stage
Description
Design Features
Travels to 240 μm x 240 μm x 25 μm
Large square clear aperture up to 66 mm x 66 mm
Superior multi-axis accuracy via parallel kinematic design
High stiffness and dynamics resulting in high process throughput
High-precision, frictionless flexure guidance
Patent-pending design provides unmatched geometric performance
Long device lifetime
Superior positioning resolution and linearity with direct-metrology capacitive sensor option
Open-loop and vacuum versions
Aerotech’s QNP3 Series of XYZ parallel kinematic piezo positioning stages combines sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact low-profile package. The QNP3 series piezo stages come standard with a large, clear aperture with closed-loop travels up to 200 µm x 200 µm x 20 µm (open-loop travels to 240 µm x 240 µm x 25 µm). The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three DoF manipulation.
Precision Parallel-Kinematic Design
The QNP3 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest levels of multi-axis accuracy. Guided by precision flexures which are FEA-optimized to ensure high stiffness and long device life, the QNP3 stages offer best-in-class stiffness and resonant frequency enabling high process throughput and fast closed-loop response.
Using a patent-pending drive design, X and Y yaw errors are minimized while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors.
Sub-Nanometer Performance
All QNP3 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design measures the output of the positioning carriage, directly enabling sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.
Ultra-Precision Control
When coupled with Aerotech’s Q-series controllers and drives, the QNP3 stages demonstrate sub-nanometer positioning resolution, in-position stability (jitter), and high positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.
Design Options
An optional mounting plate provides direct mounting English or metric breadboard optical tables. A solid tabletop option is also available. QNP3 piezo stages are available in custom materials and vacuum-prepared versions upon request.
QNP3-100XYAZ-030-10 Three-Axis, Parallel Kinematic, XYZ Piezo Nanopositioning Stage
Specifications |
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|---|---|
| Axes Of Motion: | Three |
| Travel Range: | 0.03 mm |
| Load Capacity (Horizontal): | 1 kg |
| Load Capacity (Vertical): | 1 kg |
| Max Speed: | N/A mm/s |
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Frequently Asked Questions
Yes, an optional mounting plate provides direct mounting English or metric breadboard optical tables. A solid tabletop option is also available.
The capacitive sensor option provides sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.
The stage has closed-loop travels up to 200 µm x 200 µm x 20 µm and open-loop travels up to 240 µm x 240 µm x 25 µm.
The QNP3 series piezo stage is suitable for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three DoF manipulation.
The QNP3 series piezo stage is available with closed-loop feedback (-C) or open-loop (no feedback).