SD15/30.x.C Uniaxial Piezoelectric High-Speed Scanning Motion Linear Stage

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Specifications

Axes Of Motion: One
Travel Range: 0.015 mm
Load Capacity (Horizontal): Not Specified
Load Capacity (Vertical): Not Specified
Max Speed: Not Specified
Weight: 0.25 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Resolution: 0.1/0.2 nm
Repeatability: 2/4 nm
Linearity Error: 0.035 %
Yaw: 2 urad
Pitch: 2 urad
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Features


  • Travel range in X: 15 um, 30 um

  • Size: 62 mm × 40 mm× 13.5 mm, 80 mm × 40 mm× 13.5 mm

  • Close loop resolution < 0.1nm;

  • Capacitive sensor

  • High dynamic

  • Support Options: high vacuum (.HV）& ultra- high vacuum (.UHV）

Applications


  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems

  • Work in a glove box