NNS-XY100RZ2-01 High Precision XYZ-axis Nano Positioning Stage

Sanying MotionControl Instruments Ltd.

Specifications

Axes Of Motion: Three
Travel Range: 0.1 mm
Load Capacity (Horizontal): Not Specified
Load Capacity (Vertical): Not Specified
Max Speed: Not Specified
Weight: 1.1 kg
Guiding Mechanism: Other
Voltage Requirement: Other
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Features


  • Range 100μm/100μm/±1mrad  

  • Close-loop resolution up to 0.5nm/0.5nm/0.1μrad 

Applications


  • Optical Microscopy  

  • Optical Metrology

  • Laser Processing    

  • High-precision Autofocus

  • Objective turret adjustment and scanning