Description
The S100.xyz.C — 2D/3D Scanning Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. It is part of the "Lab Series" by MultiFields Technologies and offers precise and reliable motion control.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The S100.xyz.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
S100.xyz.C — 2D/3D Scanning Stage
Specifications
| Axes Of Motion: | Two, Three |
|---|---|
| Travel Range: | 0.1 mm |
| Load Capacity (Horizontal): | Not Specified |
| Load Capacity (Vertical): | Not Specified |
| Max Speed: | Not Specified |
| Weight: | 0.5 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Linearity Error: | 0.1 % |
| Rigidity: | 0.5 N/um |
| Max Operating Voltage: | 150 V |
Download Data Sheet
Features
- Travel range in X, Y, Z: 100 um × 100 um × 100 um；
- Size: 55 mm × 55 mm × 40 mm;
- Close loop resolution: < 1 nm
- Non-magnetic (.NM) and ultra- high vacuum (.UHV)options
Applications
- Work in a glove box
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
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