S300.x.C — Single-Axis Scanning Motion Piezoelectric Stage

Specifications

Axes Of Motion: One
Travel Range: 0.3 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): Not Specified
Max Speed: Not Specified
Weight: 0.2 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Resolution(open Loop): 3 nm
Linearity Error: 0.1 %
Resonance Frequency: 350 Hz
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Features


  • Travel range (X direction): 300 um 

  • Size: 50 mm × 50 mm × 17 mm 

  • Close loop resolution: < 3 nm (open loop optional) 

  • Max Load: 500 g 

  • Non-magnetic (.NM) and ultra- high vacuum (.UHV) versions available

Applications


  • Work in a glove box

  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems