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Description

The S300.x.C — Single-Axis Scanning Motion Piezoelectric Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. 

The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The S300.x.C is scanning motion is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.

S300.x.C — Single-Axis Scanning Motion Piezoelectric Stage

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Specifications

Axes Of Motion: One
Travel Range: 0.3 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): Not Specified
Max Speed: Not Specified
Weight: 0.2 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Resolution（open Loop）: 3 nm
Linearity Error: 0.1 %
Resonance Frequency: 350 Hz

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Features

  • Travel range (X direction): 300 um 
  • Size: 50 mm × 50 mm × 17 mm 
  • Close loop resolution: < 3 nm (open loop optional) 
  • Max Load: 500 g 
  • Non-magnetic (.NM) and ultra- high vacuum (.UHV) versions available

Applications

  • Work in a glove box
  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems

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