Description
The Piezo·XYZ Scanner SH30.xyz.C is a high-performance, three-axis motion control stage designed for precision applications in high-vacuum and ultra-high-vacuum environments.
With a compact footprint (160 mm x 160 mm x 35 mm), it offers impressive travel ranges of 30 µm x 30 µm x 15 µm along the X, Y, and Z axes. The scanner's closed-loop resolution is < 0.3 nm, providing exceptional accuracy for nanoscale positioning.
This scanner is ideal for applications requiring high precision and can support loads up to 10 kg, making it suitable for both lightweight and heavy components. It is compatible with high-vacuum (.HV) and ultra-high-vacuum (.UHV) environments, ensuring optimal performance in a range of scientific and industrial applications.
The SH30.xyz.C is equipped with a capacitive sensor for enhanced position feedback and repeatability, and it operates over a wide temperature range of -20°C to 80°C.
Whether for nanotechnology, semiconductor research, or other precision applications, the SH30.xyz.C delivers reliable and high-precision motion control.
SH30.xyz.C-RT Piezo Scanning Motion Solution High Load “SH Series“
Specifications
| Axes Of Motion: | One |
|---|---|
| Travel Range: | 0.03 mm |
| Load Capacity (Horizontal): | 10 kg |
| Load Capacity (Vertical): | Not Specified |
| Max Speed: | Not Specified |
| Weight: | 4 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Resonance Frequency: | 500 Hz |
| Max Operating Voltage: | 150 V |
| Movement Directions: | X, Y, Z |
| Footprint: | 160 x 160 x 35 mm |
| Mainbody Materials: | Stainless Steel |
| Max Operating Voltage: | 150 V |
| Operating Temperature Range: | -20° to +80 °C |
| Cable Length: | 1 m with D-Sub 3W3 connectors |
Got questions about specs? Use the inquiry form to ask.
Download Data Sheet
Features
- Compact Design: Footprint of 160 mm x 160 mm x 35 mm for easy integration into lab setups
- High-Precision Motion: Travel range of 30 µm x 30 µm x 15 µm with < 0.3 nm closed-loop resolution
- High Load Capacity: Supports up to 10 kg, suitable for heavy components
- Capacitive Sensor: Provides enhanced position feedback for superior accuracy
- Vacuum Compatibility: Available in .HV (high vacuum) and .UHV (ultra-high vacuum) versions
- Wide Operating Temperature: Functions in a temperature range from -20°C to 80°C
- High Resonance Frequency: Unloaded resonance frequency of 500 Hz for fast response times
- Low Weight: Lightweight design with a weight of 4 kg, easy to handle and integrate.
- Max Operating Voltage: 150 V for flexible power input requirements
Applications
- Nanotechnology Research: Ideal for precise positioning of nanoscale components
- Semiconductor Fabrication: Excellent for applications requiring high load capacity and precision motion control
- High-Vacuum and UHV Environments: Works in ultra-high vacuum and high-vacuum conditions for research and testing
- Surface Science Experiments: Suitable for experiments requiring accurate and repeatable 3D movement
- Microscopy and Imaging Systems: Ideal for precise stage movement in microscopy and related systems
Frequently Asked Questions
What is the maximum load capacity of the Piezo·XYZ Scanner SH30.xyz.C?
Can the Piezo·XYZ Scanner SH30.xyz.C be used in high-vacuum and ultra-high-vacuum environments?
What is the travel range and resolution of the SH30.xyz.C?
What is the operating temperature range for the SH30.xyz.C?
What are the benefits of using the capacitive sensor option (.C) for the SH30.xyz.C?
Got more questions? Use the inquiry form to ask the supplier directly.
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