SH30.xyz.C-RT Piezo Scanning Motion Solution High Load “SH Series“

Name: SH30.xyz.C-RT Piezo Scanning Motion Solution High Load “SH Series“
Brand: Zolix Instruments CO.,LTD
Availability: InStock

Description

The Piezo·XYZ Scanner SH30.xyz.C is a high-performance, three-axis motion control stage designed for precision applications in high-vacuum and ultra-high-vacuum environments.

With a compact footprint (160 mm x 160 mm x 35 mm), it offers impressive travel ranges of 30 µm x 30 µm x 15 µm along the X, Y, and Z axes. The scanner's closed-loop resolution is < 0.3 nm, providing exceptional accuracy for nanoscale positioning.

This scanner is ideal for applications requiring high precision and can support loads up to 10 kg, making it suitable for both lightweight and heavy components. It is compatible with high-vacuum (.HV) and ultra-high-vacuum (.UHV) environments, ensuring optimal performance in a range of scientific and industrial applications.

The SH30.xyz.C is equipped with a capacitive sensor for enhanced position feedback and repeatability, and it operates over a wide temperature range of -20°C to 80°C.

Whether for nanotechnology, semiconductor research, or other precision applications, the SH30.xyz.C delivers reliable and high-precision motion control.

Specifications

Axes Of Motion:	One
Travel Range:	0.03 mm
Load Capacity (Horizontal):	10 kg
Load Capacity (Vertical):	Not Specified
Max Speed:	Not Specified
Weight:	4 kg
Guiding Mechanism:	Other
Voltage Requirement:	Other
Resonance Frequency:	500 Hz
Max Operating Voltage:	150 V
Movement Directions:	X, Y, Z
Footprint:	160 x 160 x 35 mm
Mainbody Materials:	Stainless Steel
Max Operating Voltage:	150 V
Operating Temperature Range:	-20° to +80 °C
Cable Length:	1 m with D-Sub 3W3 connectors

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Features

Compact Design: Footprint of 160 mm x 160 mm x 35 mm for easy integration into lab setups

High-Precision Motion: Travel range of 30 µm x 30 µm x 15 µm with < 0.3 nm closed-loop resolution

High Load Capacity: Supports up to 10 kg, suitable for heavy components

Capacitive Sensor: Provides enhanced position feedback for superior accuracy

Vacuum Compatibility: Available in .HV (high vacuum) and .UHV (ultra-high vacuum) versions

Wide Operating Temperature: Functions in a temperature range from -20°C to 80°C

High Resonance Frequency: Unloaded resonance frequency of 500 Hz for fast response times

Low Weight: Lightweight design with a weight of 4 kg, easy to handle and integrate.

Max Operating Voltage: 150 V for flexible power input requirements

Applications

Nanotechnology Research: Ideal for precise positioning of nanoscale components

Semiconductor Fabrication: Excellent for applications requiring high load capacity and precision motion control

High-Vacuum and UHV Environments: Works in ultra-high vacuum and high-vacuum conditions for research and testing

Surface Science Experiments: Suitable for experiments requiring accurate and repeatable 3D movement

Microscopy and Imaging Systems: Ideal for precise stage movement in microscopy and related systems

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Ships from:

China

Sold by:

Zolix Instruments CO.,LTD

On FindLight:

since 2020

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Frequently Asked Questions

What is the maximum load capacity of the Piezo·XYZ Scanner SH30.xyz.C?

The Piezo·XYZ Scanner SH30.xyz.C can support a maximum load of 10 kg, making it suitable for a wide range of applications, including those that require handling heavier components with high precision.

Can the Piezo·XYZ Scanner SH30.xyz.C be used in high-vacuum and ultra-high-vacuum environments?

Yes, the SH30.xyz.C is compatible with both high-vacuum (.HV) and ultra-high-vacuum (.UHV) environments. It can operate in ultra-high vacuum conditions down to 2 E-11 mbar, making it ideal for sensitive research applications that require such environments.

What is the travel range and resolution of the SH30.xyz.C?

The SH30.xyz.C offers a travel range of 30 µm x 30 µm x 15 µm in the X, Y, and Z axes. Its resolution is < 0.3 nm in closed-loop mode, providing extremely precise and accurate positioning for demanding applications.

What is the operating temperature range for the SH30.xyz.C?

The Piezo·XYZ Scanner SH30.xyz.C operates effectively within a temperature range of -20°C to 80°C, making it suitable for various environments, from cryogenic conditions to room temperature applications.

What are the benefits of using the capacitive sensor option (.C) for the SH30.xyz.C?

The capacitive sensor option (.C) offers enhanced position feedback, resulting in superior accuracy and repeatability. It provides closed-loop control with a high resolution of < 0.3 nm, ensuring reliable and precise motion control for sensitive experiments or high-precision applications.