Description
The LS65x.Lab-Linear Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. It is part of the "Lab Series" by MultiFields Technologies and offers precise and reliable motion control.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The LS65x.Lab is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
LS65x.Lab. High-Load Horizontal Motion Units with High Resolution
Specifications
| Axes Of Motion: | One |
|---|---|
| Travel Range: | 30 mm |
| Load Capacity (Horizontal): | 0.15 kg |
| Load Capacity (Vertical): | Not Specified |
| Max Speed: | 20 mm/s |
| Weight: | 2 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Holding Force: | 5 N |
| Sensor Range: | 30 mm |
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Features
- Very Quiet, 20 kHz drive frequency
- Compact Design, 65 mm × 65 mm × 13 mm
- Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)
- High Precision -Resolution (.O): 4.88 nm,2.44 nm or 10nm, 1nm optional Economy type -Resolution (.R): 100 - 200nm
- Mini Step Size, ~ 10 nm
- Multi-axis stacking adapters available
- Controller compatible with rotary and tilting stage
- Support Options, non-magnetic (.NM), high vacuum(.HV) and ultra- high vacuum (.UHV)
Applications
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
- Work in a glove box
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