LS65x.Lab. High-Load Horizontal Motion Units with High Resolution

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Specifications

Axes Of Motion: One
Travel Range: 30 mm
Load Capacity (Horizontal): 0.15 kg
Load Capacity (Vertical): Not Specified
Max Speed: 20 mm/s
Weight: 2 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Holding Force: 5 N
Sensor Range: 30 mm
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Features


  • Very Quiet, 20 kHz drive frequency

  • Compact Design, 65 mm × 65 mm × 13 mm

  • Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)

  • High Precision -Resolution (.O): 4.88 nm,2.44 nm or 10nm, 1nm optional Economy type -Resolution (.R): 100 - 200nm

  • Mini Step Size, ~ 10 nm

  • Multi-axis stacking adapters available

  • Controller compatible with rotary and tilting stage 

  • Support Options, non-magnetic (.NM), high vacuum(.HV) and ultra- high vacuum (.UHV)

Applications


  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems

  • Work in a glove box