LS65x.Lab. High-Load Horizontal Motion Units with High Resolution

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Specifications

Axes Of Motion: One
Travel Range: 30 mm
Load Capacity (Horizontal): 0.15 kg
Load Capacity (Vertical): Not Specified
Max Speed: 20 mm/s
Weight: 2 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Holding Force: 5 N
Sensor Range: 30 mm
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Features

  • Very Quiet, 20 kHz drive frequency
  • Compact Design, 65 mm × 65 mm × 13 mm
  • Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)
  • High Precision -Resolution (.O): 4.88 nm,2.44 nm or 10nm, 1nm optional Economy type -Resolution (.R): 100 - 200nm
  • Mini Step Size, ~ 10 nm
  • Multi-axis stacking adapters available
  • Controller compatible with rotary and tilting stage 
  • Support Options, non-magnetic (.NM), high vacuum(.HV) and ultra- high vacuum (.UHV)

Applications

  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems
  • Work in a glove box