LS35z.Lab.O.R Vertical motion with special design, various versions supplied

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Specifications

Axes Of Motion: One
Travel Range: 10 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): Not Specified
Max Speed: 10 mm/s
Weight: 0.2 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Drive Frequency: Max. 20 kHz (very quiet)
Pitch: 0.3 mrad
Yaw: 0.3 mard
Sensor Type: Resistive Sensor (.R) | Optic Encoder (.O)
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Features


  • Very Quiet, 20 kHz drive frequency

  • Compact Design, 35 × 35 mm × 33 mm

  • Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)

  • High Precision -Resolution (.O): 10 nm or 4.88 nm,2.44 nm,1nm, optional

  • Economy type -Resolution (.R): 100 - 200nm

  • Mini Step Size, ~ 10 nm

  • Multi-axis stacking adapters available

  • Controller compatible with rotary and tilting stage

  • Support Options, high vacuum (.HV）& ultra- high 
    vacuum (.UHV）

Applications


  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems