Description
The S100.z.C / S — Single-Axis Scanning Motion Linear Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The S100.z.C / S is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
S100.z.C / S — Single-Axis Scanning Motion Linear Stage
Specifications
| Axes Of Motion: | One |
|---|---|
| Travel Range: | 0.1 mm |
| Load Capacity (Horizontal): | 0.5 kg |
| Load Capacity (Vertical): | Not Specified |
| Max Speed: | Not Specified |
| Weight: | 0.15 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Linearity Error: | 0.02 % |
| Rigidity: | 0.5 N/um |
| Max Drive Voltage（Z）: | 150 V |
Download Data Sheet
Features
- Travel range in Z: 100 um
- Size: 40 mm × 40 mm × 18 mm
- Close loop resolution: < 1 nm (open loop optional)
- Max Load: 500 g
- Support Options, non-magnetic (.NM) and ultra- high vacuum (.UHV)
Applications
- Work in a glove box
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
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