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Electron Sources

Affordable E-Beam
Cooke Vacuum Products
This is our most popular mid-size system, since the III-V and photonic device community operates at smaller wafer and batch sizes than current Si development demands, making a clean pumped, manual-loading simple system exceptionally suitable for both R&D and production. Chambers 18-22\" diameter x 24-30 high usual, larger on ...
  • Energy Range: 0 - 0 eV
  • Max Beam Current: - uA
  • Min Beam Size: - um
Data Sheet
The Kimball Physics EGA-1012 Electron Gun, with its matching EGPS-1012 Power Supply, is intended for use in a variety of UHV, surface physics, and processing applications where high beam currents are needed at low energy. It is a complete subsystem ready to attach and turn on. Beam energy, beam current and beam divergence are all ...
  • Energy Range: 5 - 1000 eV
  • Max Beam Current: 0.002 uA
  • Min Beam Size: 10000 um
Data Sheet
The Kimball Physics FRA-2X1-2 Electron Gun, with its matching EGPS-1011 Power Supply, is intended for use in a variety of UHV, surface physics, charge neutralization, and processing applications. It is a complete subsystem ready to attach to the user’s vacuum system and turn on. Both beam energy and beam current are adjustable over ...
  • Energy Range: 5 - 1000 eV
  • Max Beam Current: 0.4 uA
  • Min Beam Size: 2000 um
Data Sheet
The Kimball Physics ELG-2 Electron Gun, with its matching EGPS-1022 Power Supply, is intended for use in electron stimulated desorption studies, secondary electron emission coefficient measurement studies, surface physics and other vacuum physics studies. It is a complete subsystem ready to attach and turn on. Beam energy, beam ...
  • Energy Range: 1 - 2000 eV
  • Max Beam Current: 0.01 uA
  • Min Beam Size: 500 um
Data Sheet
EH-20-10 Electron Source
Staib Instruments Inc
This electron source delivers a high power density beam into a small spot, for applications including evaporation, X-ray generation, thermal shocks, annealing, and detector testing.
  • Energy Range: 1000 - 20000 eV
  • Max Beam Current: 500 uA
  • Min Beam Size: 150 um
Data Sheet
EH-20-20
Staib Instruments Inc
This electron source delivers a high power density beam into a small spot, for applications including evaporation, X-ray generation, thermal shocks, annealing, and detector testing.
  • Energy Range: 1000 - 20000 eV
  • Max Beam Current: 1000 uA
  • Min Beam Size: 150 um
Data Sheet
NEK-150-SC Electron Source
Staib Instruments Inc
This electron source provides a high beam current at low beam energies as needed for dissociation, ionization, excitation, and charge neutralization. This model has scanning capability. 
  • Energy Range: 1 - 100 eV
  • Max Beam Current: 100 uA
  • Min Beam Size: 2000 um
Data Sheet
RHEED-15
Staib Instruments Inc
RHEED guns from STAIB Instruments provide unique electron optics systems for diffraction studies. Important options include differential pumping (DP) for use in high pressures and beam rocking to expand the sample positions that can be monitored. Short (S) or super short (SS) housings can be selected for confined ...
  • Energy Range: 500 - 15000 eV
  • Max Beam Current: 30 uA
  • Min Beam Size: 100 um
Data Sheet
RHEED-12
Staib Instruments Inc
RHEED guns from STAIB Instruments provide unique electron optics systems for diffraction studies. RHEED-12 features full electrostatic electron optics and electrostatic beam deflection. The source is µ metal shielded.   
  • Energy Range: 500 - 12000 eV
  • Max Beam Current: 30 uA
  • Min Beam Size: 100 um
Data Sheet
EF-1201 Electron Gun Column
Staib Instruments Inc
This electron gun column is designed to generate a very small spot in the nm range. It is also available as part of a complete scanning electron imaging package (SEM-package).
  • Energy Range: 200 - 12 eV
  • Max Beam Current: 2 uA
  • Min Beam Size: 0.15 um
Data Sheet
EF-1202 Electron Gun Column
Staib Instruments Inc
This electron gun column is designed to generate a very small spot in the nm range. It is also available as part of a complete scanning electron imaging package (SEM-package).
  • Energy Range: 200 - 12000 eV
  • Max Beam Current: 2 uA
  • Min Beam Size: 0.25 um
Data Sheet
EF-15005 Electron Gun Column
Staib Instruments Inc
This electron gun column is designed to generate a very small spot in the nm range. It is also available as part of a complete scanning electron imaging package (SEM-package).
  • Energy Range: 200 - 15000 eV
  • Max Beam Current: 1 uA
  • Min Beam Size: 0.85 um
Data Sheet