LS35x .Lab Linear motion with position control, high resolution & super-quiet motion

Specifications

Axes Of Motion: One
Travel Range: 20 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): Not Specified
Max Speed: 20 mm/s
Weight: 0.5 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Dynamic Force: 2 N
Holding Force: 5 N
Pitch / Yaw: 500 g 0.3 mrad(0.017°)
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Features

  • Very Quiet, 20 kHz drive frequency
  • Compact Design, 35 × 35 mm × 12 mm
  • Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)
  • High Precision -Resolution (.O): 10 nm or 4.88 nm,2.44 nm,1nm, optional
  • Economy type -Resolution (.R): 100 - 200nm
  • Mini Step Size, ~ 10 nm
  • Multi-axis stacking adapters available
  • Controller compatible with rotary and tilting stage
  • Support Options, non-magnetic (.NM)、high vacuum 
    (.HV)& ultra- high vacuum (.UHV)

Applications

  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems
  • Work in a glove box