High Vacuum Motorized Linear Stage X-LRQ300AL-SV2

Specifications

Number Of Axes: One
Vacuum Grade: 10 mbar
Vacuum Compatibility: 10-6 Torr
Travel Range: 300 mm
Load Capacity: 100 kg
Maximum Speed: 205 mm/s
Power Supply: 24-48 VDC
Microstep Size: 0.09921875 µm
Minimum Speed: 0.000061 mm/s
Speed Resolution: 0.000061 mm/s
Communication Interface: RS-232
Communication Protocol: Zaber ASCII, Zaber Binary
Vertical Runout: < 190 µm
Horizontal Runout: < 31 µm
Maximum Current Draw: 1200 mA
Motor Rated Current: 2100 mA/phase
Document icon Download Data Sheet Download icon

Features

  • Vacuum Compatibility: Designed for high vacuum environments, compatible up to 10-6 Torr.
  • Travel Range: Available in multiple travel lengths: 75, 150, 300, 450, and 600 mm.
  • Load Capacity: Supports up to 100 kg load, with a maximum centered load of 1000 N.
  • Speed and Thrust: Achieves speeds up to 205 mm/s and a peak thrust of 100 N.
  • Built-in Controller: Integrated controller allows for easy daisy-chaining with other Zaber products.
  • Minimal Wiring: Requires only 4 feedthrough wires for control via serial port using an X-PIB adaptor.
  • Compact Design: Low profile at only 36 mm high, ideal for applications requiring a compact form factor.
  • Plug and Play: Easy setup and operation with standard 24 V or 48 V power supply.
  • Communication Interface: Connects via RS-232 or USB, supporting Zaber ASCII and Zaber Binary protocols.
  • Precision and Accuracy: Features a microstep size of 0.09921875 µm, unidirectional accuracy of 90 µm, and repeatability of < 2.5 µm.
  • Mechanical Drive System: Utilizes a precision lead screw and recirculating ball linear guide for reliable motion.
  • Home Sensing: Equipped with a magnetic home sensor for precise positioning.
  • Mounting Interface: Includes M6 and M3 threaded holes for versatile mounting options.
  • Power and Current: Operates with a maximum current draw of 1200 mA, powered by 24-48 VDC.
  • Temperature Range: Suitable for a wide range of operating temperatures.

Applications

  • Vacuum-Based Research Systems: For precise positioning within high vacuum chambers in physics and materials labs.
  • Semiconductor Manufacturing: Enables accurate wafer positioning and alignment under vacuum conditions.
  • Optics and Photonics Alignment: Ideal for aligning optical components in vacuum environments.
  • Surface Metrology and Profiling: Facilitates high-resolution scanning of surfaces under vacuum.
  • Advanced Microscopy Systems: Supports sample positioning in electron and ion beam microscopes.