Model 458 UV High Intensity & Energy Meters For Wafer Steppers
Description
The microprocessor based Model 458 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths. Optional RS232 cable available to work with the 458 software to send dose data to a computer.
Model 458 UV High Intensity & Energy Meters For Wafer Steppers
Specifications |
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|---|---|
| Max Measurable Energy: | 9999 mJ |
| Max Repetition Rate: | -- Hz |
| Effective Aperture: | -- mm |
| Spectral Range: | 0.365-0.436um |
Features
Averages up to 9 exposures
Digital display provides clear, NIST traceable measurements
Measures Intensity, Time, and Energy
Records % deviation over a series of exposures
Probe wavelength display helps prevent errors in setup
Simple push button operation provides reliable results
RS 232 output to download and record analyzer measurement results
Detachable probes to match the spectral response of many photoresists
Display readings can be frozen
Front panel reminders prompt the user
Rugged aluminum case features handle and probe pouch for portability
Applications
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Frequently Asked Questions
The Model 458 UV Light Intensity & Energy System has features such as averaging up to 9 exposures, digital display for clear, NIST traceable measurements, RS 232 output to download and record analyzer measurement results, and detachable probes to match the spectral response of many photoresists.
The accuracy of the Model 458 UV Light Intensity & Energy System is ± 3 for WB and ± 1.5 for NB.
The Model 458 UV Light Intensity & Energy System is used to accurately profile exposure energy (dose) to assess the performance of the stepper.
The power source for the Model 458 UV Light Intensity & Energy System is 110/220 VAC, 50/60 Hz, rechargeable 6v battery (with automatic shut off).
The Model 458 UV Light Intensity & Energy System measures intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths.