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- Model 458 UV High Intensity & Energy Meters For Wafer Steppers
Model 458 UV High Intensity & Energy Meters For Wafer Steppers
OVERVIEW
The microprocessor based Model 458 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths. Optional RS232 cable available to work with the 458 software to send dose data to a computer.
SPECIFICATION
- Max Measurable Energy: 9999 mJ
- Max Repetition Rate: -- Hz
- Effective Aperture: -- mm
- Spectral Range: 0.365 - 0.436 um
Applications
KEY FEATURES
Averages up to 9 exposures
Digital display provides clear, NIST traceable measurements
Measures Intensity, Time, and Energy
Records % deviation over a series of exposures
Probe wavelength display helps prevent errors in setup
Simple push button operation provides reliable results
RS 232 output to download and record analyzer measurement results
Detachable probes to match the spectral response of many photoresists
Display readings can be frozen
Front panel reminders prompt the user
Rugged aluminum case features handle and probe pouch for portability
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