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Page 3 - Energy Sensors

Gentec-EO offers QE95 series energy detectors for pulse energy measurements of up to 250J in a wide spectral range with an attenuator and 70J - without attenuator. 

Specifications

Max Measurable Energy: 250000 mJ
Max Repetition Rate: 10 Hz
Effective Aperture: 95 mm
Spectral Range: 0.3-2.1um
Damage Threshold (Max Power): 90 W
Data Sheet
Gentec-EO offers QE95 series energy detectors for pulse energy measurements of up to 250J in a wide spectral range with an attenuator and 70J - without attenuator. 

Specifications

Max Measurable Energy: 70000 mJ
Max Repetition Rate: 10 Hz
Effective Aperture: 95 mm
Spectral Range: 0.19-20um
Damage Threshold (Max Power): 40 W
Data Sheet
Gentec-EO offers QE95 series energy detectors for pulse energy measurements of up to 250J in a wide spectral range with an attenuator and 70J - without attenuator. 

Specifications

Max Measurable Energy: 70000 mJ
Max Repetition Rate: 10 Hz
Effective Aperture: 95 mm
Spectral Range: 0.19-20um
Data Sheet
Gentec-EO offers QE95 series energy detectors for pulse energy measurements of up to 250J in a wide spectral range with an attenuator and 70J - without attenuator. 

Specifications

Max Measurable Energy: 250000 mJ
Max Repetition Rate: 10 Hz
Effective Aperture: 95 mm
Spectral Range: 0.3-2.1um
Data Sheet
Gentec-EO offers QE95 series energy detectors for pulse energy measurements of up to 250J in a wide spectral range with an attenuator and 70J - without attenuator. 

Specifications

Max Measurable Energy: 250000 mJ
Max Repetition Rate: 40 Hz
Effective Aperture: 95 mm
Spectral Range: 0.3-2.1um
Damage Threshold (Max Power): 90 W
Data Sheet
The Gentec-EO QE series is a robust line of high performance and high accuracy pyroelectric joulemeters that are designed to measure laser energy. Each modular unit is built for durability, compactness and ease of operation.  The QE optical absorber exhibits high damage thresholds and can operate at high ...

Specifications

Max Measurable Energy: 2300 mJ
Max Repetition Rate: 1000 Hz
Effective Aperture: 22 mm
Spectral Range: 0.3-2.1um
Data Sheet
The Gentec-EO QE series is a robust line of high performance and high accuracy pyroelectric joulemeters that are designed to measure laser energy. Each modular unit is built for durability, compactness and ease of operation.  The QE optical absorber exhibits high damage thresholds and can operate at high ...

Specifications

Max Measurable Energy: 25000 mJ
Max Repetition Rate: 100 Hz
Effective Aperture: 65 mm
Spectral Range: 0.19-20um
Data Sheet
Model 406 Single Element Pyroelectric IR Detector With Source Follower
Eltec Instruments Inc
Model 405 consists of two lithium tantalate sensing elements, a load resistor and a JFET sealed into a TO-5 transistor package with an optical filter. A patented element mounting technique is used to improve thermal time constant and reduce effects of microphony. 

Specifications

Max Measurable Energy: -- mJ
Max Repetition Rate: 1 Hz
Effective Aperture: 2.0 mm
Spectral Range: 0.1-1000um
Data Sheet
Model 405 High Gain Thermally Compensated Pyroelectric IR Detector
Eltec Instruments Inc
Model 405 consists of two lithium tantalate sensing elements, a load resistor and a JFET sealed into a TO-5 transistor package with an optical filter. One certainly located sensing element is exposed to infrared radiation entering through the optical filter while the second element is shielded from outside ...

Specifications

Max Measurable Energy: -- mJ
Max Repetition Rate: 1 Hz
Effective Aperture: 1.0 mm
Spectral Range: 0.1-1000um
Data Sheet
Model 400 Single Element UV-VIS-IR Pyroelectric Detector
Eltec Instruments Inc
Model 400 consists of a single lithium tantalate sensing element sealed into a TO-5 transistor housing with an optical sensor. A patented element mounting technique is used to increase low frequency response and reduce effects of microphony. 

Specifications

Max Measurable Energy: -- mJ
Max Repetition Rate: 10000 Hz
Effective Aperture: 2.0 mm
Spectral Range: 0.1-1000um
Data Sheet
Model 458 UV High Intensity & Energy Meters For Wafer Steppers
OAI
The microprocessor based Model 458 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) ...

Specifications

Max Measurable Energy: 9999 mJ
Max Repetition Rate: -- Hz
Effective Aperture: -- mm
Spectral Range: 0.365-0.436um
Data Sheet
Model 457 UV Intensity & Energy Meter
OAI
Designed for use with ASML, Canon, Nikon and GCA & Rudolph Technology Wafer Steppers the Model 457 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It reads intensity, energy, and time (16-1600 mW/cm², 999.9 mJ/cm²) for 400 and 420 nm wavelengths. Optional ...

Specifications

Max Measurable Energy: 9999 mJ
Max Repetition Rate: -- Hz
Effective Aperture: -- mm
Spectral Range: 0.365-0.436um
Data Sheet