Model 457 UV Intensity & Energy Meter
Description
Designed for use with ASML, Canon, Nikon and GCA & Rudolph Technology Wafer Steppers the Model 457 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It reads intensity, energy, and time (16-1600 mW/cm², 999.9 mJ/cm²) for 400 and 420 nm wavelengths. Optional RS232 cable available to work with the 457 software to send dose data to a computer.
Model 457 UV Intensity & Energy Meter
Specifications |
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|---|---|
| Max Measurable Energy: | 9999 mJ |
| Max Repetition Rate: | -- Hz |
| Effective Aperture: | -- mm |
| Spectral Range: | 0.365-0.436um |
Features
Averages up to 9 exposures
Digital display provides clear, NIST traceable measurements
Measures Intensity, Time, and Energy
Records % deviation over a series of exposures
Probe wavelength display helps prevent errors in setup
Simple push button operation provides reliable results
RS 232 output to download and record analyzer measurement results
Detachable probes to match the spectral response of many photoresists
Display readings can be frozen
Front panel reminders prompt the user
Rugged aluminum case features handle and probe pouch for portability
Applications
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
- Direct contact with supplier
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United States
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Frequently Asked Questions
The Model 457 UV Intensity & Energy Meter is used for Projection Aligners, Contact Mask Aligners, Wafer Steppers, and High Intensity Wafer Steppers.
The Model 457 UV Intensity & Energy Meter features digital display for clear, NIST traceable measurements, measures Intensity, Time, and Energy, records % deviation over a series of exposures, RS 232 output to download and record analyzer measurement results, detachable probes to match the spectral response of many photoresists, and display readings can be frozen.
The Model 457 UV Intensity & Energy Meter has an accuracy of ± 3.0 (WB) and ± 1.5 (NB).
The Model 457 UV Intensity & Energy Meter is designed to accurately profile exposure energy (dose) to assess the performance of ASML, Canon, Nikon and GCA & Rudolph Technology Wafer Steppers.
The Model 457 UV Intensity & Energy Meter measures intensity range of 16-1600 mw/cm2 and energy range of 0-9999 mJ/cm2 for 400 and 420 nm wavelengths.