Description
The ERUA series rotary stage adopts a closed large load-bearing air floating structure design, driven by a high torque direct drive motor, and a circular grating feedback system to achieve high-resolution, high-precision, and high load motion control.
ERUA200 High Precision Air Bearing Rotary Stage
Sanying MotionControl Instruments Ltd.
Specifications
| Vacuum Compatible: | No |
|---|---|
| Built-in Controller: | No |
| Range: | 360 degrees |
| Unidirectional Accuracy: | Not Specified |
| Repeatability: | Not Specified |
| Backlash: | Not Specified |
| Encoder Resolution: | 0.262 CPR |
| Stage Diameter: | 200 mm |
Features
- Travel Range 360°
- Load 50kg
- Axial Runout< 0.2μm
Applications
- Semiconductor Manufacturing
- Precision Scanning
- Flat Panel Display Manufacturing
Similar Products
LDT-60WS: 50mm Travel, 0.02mm Repeatability, Motorized Rotation Stage
Nanchang Leadtop Technology Co.,Ltd
Carrier.R200 Piezoelectric Rotary Stage
Zolix Instruments CO.,LTD
RS65.Lab.O.R-Rotary Stage 65mm rotation units with dia-10mm through hole, various versions available
Zolix Instruments CO.,LTD
RS35.Lab.R Series Rotary Motorized Stage | Low Cost and Compact Design with Resistance Position Sensor
Zolix Instruments CO.,LTD
Rotator-35: Low Temperature Piezo Rotary Stage
Zolix Instruments CO.,LTD
Rotator25-Optic: Compact Low-Temperature Piezoelectric Rotary Stage with Φ 6 mm Aperture & 360° Endless Travel
Zolix Instruments CO.,LTD
Rotator25.HV: Compact Low-Temperature Piezoelectric Rotary Stage with 360° Endless Rotation
Zolix Instruments CO.,LTD
Rotator16.HV: Ultra-Compact Low-Temperature Piezoelectric Rotary Stage with Closed-Loop Control
Zolix Instruments CO.,LTD
Room Temperature Piezoelectric Lab series Rotation Stage
Zolix Instruments CO.,LTD
Low Temperature Piezoelectric Motion - Rotator Series
Zolix Instruments CO.,LTD
TBR and TBRF Series Motorized Rotation Stages
Zolix Instruments CO.,LTD
TBRK200 Motorized Rotation Stage
Zolix Instruments CO.,LTD
Thank You!
Your inquiry has been received.
Create an account by adding a password
Why create an account?
- Auto-complete inquiry forms
- View and manage all your past messages
- Save products to your favorites
- Close your account anytime — no hassle