Description
The ERUA series rotary stage adopts a closed large load-bearing air floating structure design, driven by a high torque direct drive motor, and a circular grating feedback system to achieve high-resolution, high-precision, and high load motion control.
ERUA200 High Precision Air Bearing Rotary Stage
Sanying MotionControl Instruments Ltd.
Specifications
| Vacuum Compatible: | No |
|---|---|
| Built-in Controller: | No |
| Range: | 360 degrees |
| Unidirectional Accuracy: | Not Specified |
| Repeatability: | Not Specified |
| Backlash: | Not Specified |
| Encoder Resolution: | 0.262 CPR |
| Stage Diameter: | 200 mm |
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Download Data Sheet
Features
- Travel Range 360°
- Load 50kg
- Axial Runout< 0.2μm
Applications
- Semiconductor Manufacturing
- Precision Scanning
- Flat Panel Display Manufacturing
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