Description
The RS65.Lab.O.R-Rotary Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. It is part of the "Lab Series" by MultiFields Technologies and offers precise and reliable motion control.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The RS65.Lab.O.R is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
RS65.Lab.O.R-Rotary Stage 65mm rotation units with dia-10mm through hole, various versions available
Specifications
| Vacuum Compatible: | Yes |
|---|---|
| Built-in Controller: | Yes |
| Range: | 360 degrees |
| Unidirectional Accuracy: | 0.05 degrees |
| Repeatability: | Not Specified |
| Backlash: | Not Specified |
| Encoder Resolution: | 360 CPR |
| Stage Diameter: | 65 mm |
| Holding Torque: | 15 N*mm |
| Driving Torque: | 10 N*mm |
| Rotation Plate Size: | Dia-62 mm |
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Features
- Very Quiet, 20 kHz drive frequency
- Compact Design, 65 mm × 65 mm × 18 mm
- Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)
- High Precision -Resolution (.O): 0.44urad(25u°,by default)，0.21urad, 0.11urad
- Mini Step Size, less than 3 urad
- Multi-axis stacking adapters available
- Controller compatible with linear and tilting stage
- Support Options, non-magnetic (.NM)、high vacuum (.HV）& ultra- high vacuum (.UHV）
Applications
- Work in a glove box
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
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