Description

The RS65.Lab.O.R-Rotary Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. It is part of the "Lab Series" by MultiFields Technologies and offers precise and reliable motion control.

The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The RS65.Lab.O.R is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.

RS65.Lab.O.R-Rotary Stage 65mm rotation units with dia-10mm through hole, various versions available

Specifications

Vacuum Compatible: Yes
Built-in Controller: Yes
Range: 360 degrees
Unidirectional Accuracy: 0.05 degrees
Repeatability: Not Specified
Backlash: Not Specified
Encoder Resolution: 360 CPR
Stage Diameter: 65 mm
Holding Torque: 15 N*mm
Driving Torque: 10 N*mm
Rotation Plate Size: Dia-62 mm

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Features

  • Very Quiet, 20 kHz drive frequency
  • Compact Design, 65 mm × 65 mm × 18 mm
  • Closed-loop control, Resistive Position Sensor (.R) or Optic Encoder (.O)
  • High Precision -Resolution (.O): 0.44urad(25u°,by default),0.21urad, 0.11urad
  • Mini Step Size, less than 3 urad
  • Multi-axis stacking adapters available
  • Controller compatible with linear and tilting stage 
  • Support Options, non-magnetic (.NM)、high vacuum (.HV)& ultra- high vacuum (.UHV)

Applications

  • Work in a glove box
  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems

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