EQ Photonics GmbH - EUV Photodiode - SXUV100TF135

EQ Photonics

Specifications

Diode Type: Si
Wavelength Of Operation: 13.5 nm
Max Frequency Response: DC - 10 MHz
Active Area Size: 10 mm²
Dark Current: 1-10 nA
Package Type: Custom Package
Built-In Amplifier: No
Applications: Sensing and Measurement
Filter Coating: Bandpass 13.5 nm
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Features


  • Large detection area of 10 mm x 10 mm

  • UV-Photodiode with band pass filter for 12 nm to 18 nm

  • Ideal for 13.5 nm photolithgraphic applications as well as laser measurement and -adjustment

  • Stable sensitivity at radiation with extreme UV-radiation (EUV)

  • Optional: Calibration

Applications


  • Photons, Electrons and X-Ray sensing

  • Particle accelerators

  • Storage rings

  • XUV/EUV solutions

  • Beamline Instrumentation

  • Power monitoring