Room Temperature Piezoelectric Carrier Series Stages

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Specifications

Axes Of Motion: Two
Travel Range: 75 mm
Load Capacity (Horizontal): 2 kg
Load Capacity (Vertical): Not Specified
Max Speed: 20 mm/s
Weight: Not Specified
Guiding Mechanism: Other
Voltage Requirement: DC 24V
Full-travel Pitch/yaw: 0.8 mrad
Drive Frequency (Max): 20 kHz
Min. Step: ～ 30 nm
Operating Temperature: 10 – 40 °C
Cables & Connectors: Standard shielded cable D-Sub 9 Connector
Main Material: Aluminum alloy
Effective Perforation: 85 mm × 65 mm
Required Installation Space: 325 mm × 250 mm
Dimensions: 250 mm × 200 mm × 30 mm
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Features


  • XY-directional range of 75 mm × 50 mm for versatile positioning

  • Smallest step size of about 20 nm for high-resolution control

  • Maximum velocity of 20 mm/s for fast and efficient operation

  • Closed-loop sensing with 100 nm / 10 nm spatial resolution for precise feedback

  • Guaranteed through-hole of 85 mm × 65 mm for a full range of motion

  • Supports non-magnetic (.NM) and ultra-high vacuum (.UHV) options for enhanced versatility

  • Main body made of aluminum alloy with hard oxide blackened coating for durability

Applications


  • Precision optics alignment and characterization

  • Semiconductor wafer inspection and testing

  • Microscopy and imaging systems

  • Metrology and measurement devices

  • Nanotechnology research and development

  • MEMS (Micro-Electro-Mechanical Systems) testing

  • Material science research

  • Super-resolution optical microscopy