Description
The Linear16-x is a compact, closed-loop piezoelectric motion stage designed for precision positioning in extreme environments. With a footprint of only 16mm x 16mm, it is the smallest stage in its category, ideal for ultra-high vacuum (UHV) and very low-temperature conditions, compatible with cryogenic systems down to 30mK.
This stage is made from non-magnetic materials such as pure titanium and beryllium copper, ensuring compatibility with high magnetic fields (up to 18 Tesla). It features a travel range of 3mm with a high load capacity of 50g and a dynamic force of 1.5N.
The built-in closed-loop control system ensures position accuracy with a resolution of 0.1µm, making it perfect for applications requiring high precision, such as semiconductor testing, microscopy, and scientific research in low temperature and vacuum environments.
Linear16-x Low Temperature Piezo Linear stage
Specifications
| Axes Of Motion: | One |
|---|---|
| Travel Range: | 3 mm |
| Load Capacity (Horizontal): | 0.05 kg |
| Load Capacity (Vertical): | Not Specified |
| Max Speed: | 2 mm/s |
| Weight: | 0.01 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Dynamic Force: | 1.5 N |
| Weight: | Not Specified |
| Position Encoder: | Resistive Sensor |
| Encoder Range: | 3 mm |
| Sensor Resolution: | ~150 nm |
| Footprint: | 16 x 16 x 10.5 mm |
| Temperature Range: | 1.4 to 400 K |
| Vacuum Compatibility: | 2E-11 mbar (UHV) |
| Max Magnetic Field: | 18 Tesla |
| Drive Voltage Max.: | 200 V |
| Dynamic Force: | 1.5 N |
| Sensor Resolution: | ~150 nm |
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Features
- Compact Design: 16mm x 16mm x 10.5mm footprint, making it ideal for space-constrained applications
- Ultra-Low Temperature and UHV Compatible: Operates at temperatures as low as 30mK and vacuum levels of 2E-11 mbar
- Non-Magnetic Construction: Made from pure titanium and beryllium copper for compatibility with magnetic fields up to 18 Tesla
- High Load Capacity: Supports up to 50g with a dynamic force of 1.5N for robust performance
- Closed-Loop Control: Positioning resolution of 0.1µm for highly accurate control in precision applications
- Long Travel Range: 3mm of travel for versatile motion control
Applications
- Cryogenic Systems: Ideal for He3 or dilution cryogenic systems with the ULT option
- Semiconductor Testing: Perfect for ultra-precise positioning in semiconductor fabrication and testing
- Micro/Nano-Manipulation: Suitable for applications requiring precise, small-scale movements in scientific research and instrumentation
- Vacuum Systems: Designed for use in UHV environments, including research in physics, material science, and astronomy
- High-Magnetic Field Environments: Operates reliably within strong magnetic fields, making it suitable for various high-energy physics and engineering applications
Frequently Asked Questions
What is the travel range of the Linear16-x motion stage?
The Linear16-x has a travel range of 3mm, offering precise and controlled motion within this range, ideal for applications that require small-scale positioning.
What environments is the Linear16-x compatible with?
The Linear16-x is compatible with ultra-high vacuum (UHV) environments, capable of operating at vacuum levels as low as 2E-11 mbar. It also works in extremely low-temperature environments, with an operational range from 1.4K to 400K.
Can the Linear16-x motion stage be used in high magnetic field environments?
Yes, the Linear16-x is made from non-magnetic materials such as pure titanium and beryllium copper, making it suitable for use in magnetic fields up to 18 Tesla.
What is the resolution of the closed-loop position control system?
The Linear16-x features a high-precision closed-loop control system with a position sensing resolution of 0.1µm for accurate and repeatable positioning.
What is the maximum load capacity and dynamic force of the Linear16-x?
The Linear16-x can support a maximum load of 50g, with a dynamic force of up to 1.5N, making it suitable for a variety of high-precision applications requiring small-scale but robust motion control.
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