Ambient Temperature 3-D Piezoelectric Scanning Table

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Specifications

Axes Of Motion: Three
Travel Range: 0.15 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): 0.5 kg
Max Speed: Not Specified
Weight: 0.2 kg
Guiding Mechanism: Other
Voltage Requirement: DC 24V
Cable Length: 1.5 m / micro-Sub connector
Operating Temperature: 20 ~ 80 °C
Piezoelectric Capacitance (X, Y): 120 V
Capacitance Accuracy: 0.3 nm
Closed-loop Sensors: Capacitive
Rigid: 0.5 N/um
Resonance Frequency - 50g Load: 220 Hz
Linearity Error: < 0.1%
Repeatable Accuracy Of Motion: 15 nm
Motion Resolution: 0.2 nm
Main Material: Aluminum alloy / Stainless steel
Dimensions: 55 mm × 55 mm × 55 mm
Orientation Of Movement: X, Y, Z
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Features


  • Three-dimensional XY scanning motion with a range of 150 um × 150 um × 150 um

  • Compact external dimensions of 55 mm × 55 mm × 42 mm

  • Closed-loop positioning accuracy better than 1 nm

  • Maximum load capacity of 500 g

  • Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades

  • Motion resolution of 0.2 nm for precise positioning

  • Repeatable accuracy of motion within 15 nm

  • Linearity error less than 0.1%

  • Resonance frequency of 220 Hz with a 50g load

  • Rigid design with a stiffness of 0.5 N/um

  • Equipped with capacitive closed-loop sensors for enhanced precision

  • Piezoelectric capacitance of up to 120 V for efficient motion control

  • Operating temperature range of -20 to 80 °C

  • Lightweight construction weighing 200 g

  • Comes with a 1.5 m cable and micro-Sub connector for convenient connectivity

Applications


  • Precision optics and microscopy

  • Semiconductor characterization and analysis

  • Nanoscale positioning and scanning

  • Surface metrology and profilometry

  • Advanced research and development in materials science

  • Life sciences and biotechnology research

  • Nanofabrication and nanomanipulation