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Description

The Ambient Temperature · 3-D Piezoelectric Scanning Table is a high-precision motion control device designed for scanning and positioning in applications such as precision optics and semiconductor characterization.

With three degrees of freedom and exceptional accuracy, this scanning table offers precise and reliable performance for demanding scientific and industrial applications.

Ambient Temperature 3-D Piezoelectric Scanning Table

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Specifications

Axes Of Motion: Three
Travel Range: 0.15 mm
Load Capacity (Horizontal): 0.5 kg
Load Capacity (Vertical): 0.5 kg
Max Speed: Not Specified
Weight: 0.2 kg
Guiding Mechanism: Other
Voltage Requirement: DC 24V
Cable Length: 1.5 m / micro-Sub connector
Operating Temperature: 20 ~ 80 °C
Piezoelectric Capacitance (X, Y): 120 V
Capacitance Accuracy: 0.3 nm
Closed-loop Sensors: Capacitive
Rigid: 0.5 N/um
Resonance Frequency - 50g Load: 220 Hz
Linearity Error: < 0.1%
Repeatable Accuracy Of Motion: 15 nm
Motion Resolution: 0.2 nm
Main Material: Aluminum alloy / Stainless steel
Dimensions: 55 mm × 55 mm × 55 mm
Orientation Of Movement: X, Y, Z

Got questions about specs? Use the inquiry form to ask.

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Features

  • Three-dimensional XY scanning motion with a range of 150 um × 150 um × 150 um
  • Compact external dimensions of 55 mm × 55 mm × 42 mm
  • Closed-loop positioning accuracy better than 1 nm
  • Maximum load capacity of 500 g
  • Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
  • Motion resolution of 0.2 nm for precise positioning
  • Repeatable accuracy of motion within 15 nm
  • Linearity error less than 0.1%
  • Resonance frequency of 220 Hz with a 50g load
  • Rigid design with a stiffness of 0.5 N/um
  • Equipped with capacitive closed-loop sensors for enhanced precision
  • Piezoelectric capacitance of up to 120 V for efficient motion control
  • Operating temperature range of -20 to 80 °C
  • Lightweight construction weighing 200 g
  • Comes with a 1.5 m cable and micro-Sub connector for convenient connectivity

Applications

  • Precision optics and microscopy
  • Semiconductor characterization and analysis
  • Nanoscale positioning and scanning
  • Surface metrology and profilometry
  • Advanced research and development in materials science
  • Life sciences and biotechnology research
  • Nanofabrication and nanomanipulation

Frequently Asked Questions

What is the Ambient Temperature 3-D Piezoelectric Scanning Table used for?
The Ambient Temperature 3-D Piezoelectric Scanning Table is used for scanning and positioning in applications such as precision optics and semiconductor characterization.
What are the dimensions of the scanning table?
The external dimensions of the scanning table are 55 mm × 55 mm × 42 mm.
What is the maximum load capacity of the scanning table?
The scanning table has a maximum load capacity of 500 g.
What is the motion resolution of the scanning table?
The scanning table has a motion resolution of 0.2 nm for precise positioning.
What is the operating temperature range of the scanning table?
The scanning table has an operating temperature range of -20 to 80 °C.

Got more questions? Use the inquiry form to ask the supplier directly.

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