Description
The GS65-97 Goniometer Stage is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications. It is part of the "Lab Series" by MultiFields Technologies and offers precise and reliable motion control.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. TheGS65-97 is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
GS65-97-Tilting Motion Goniometer Stage with R=97 mm, compatible with GS65-77.Lab.O Stage
Specifications
| Vacuum Compatible: | Yes |
|---|---|
| Microstep Size (default Resolution): | 0.5 urad |
| Built-in Controller: | No |
| Range Of Motion: | -10 – 10 deg |
| Accuracy (unidirectional): | 30 mrad |
| Maximum Speed: | 0.3 rpm |
| Minimum Speed: | 0.5 urad/s |
| Tilting Radius: | 97 mm |
| Self-locking Force: | 50 N*mm |
| Driving Torque: | 20 N*mm |
| Sensor Range: | 20 degree |
Download Data Sheet
Features
- Very Quiet, 20 kHz drive frequency
- Compact Design, 70mm × 70 mm × 20 mm
- Min step below 1 urad
- Multi-axis stacking adapters available
- Controller compatible with linear and rotary stage
- Support Options, high vacuum (.HV）& ultra-high vacuum (.UHV）
Applications
- Work in a glove box
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
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