High-Precision Piezoelectric Motion Goniometer35-phi: Compact & Ultra-High Vacuum Compatible Tilter Stage

Specifications

Vacuum Compatible: Yes
Microstep Size (default Resolution): 0.5 urad
Built-in Controller: No
Range Of Motion: -0.5 – 0.5 deg
Accuracy (unidirectional): 30 mrad
Maximum Speed: 0.3 rpm
Minimum Speed: 0.5 urad/s
Dynamic Force: 3 N
Rotation Center To Top Plate: 66 mm
Position Encoder: Resistive Sensor
Encoder Range: 12 deg
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Features

Ultra-high Vacuum & Low Temperature Compatibility: It is compatible with ultra-high vacuum conditions, specifically 2 E-11 mbar. The product can operate in very low temperatures, down to 30 mK.


Material Composition & Magnetic Field Compatibility: The Goniometer35-phi is composed of non-magnetic materials, specifically pure Ti and BeCu. It is compatible with high magnetic fields, up to 18 Tesla.


High Load Capacity & Rotation Center to Top Plate: The product can handle high loads, up to 500 g. The distance from the rotation center to the top plate is 66 mm.


Long Travel Range: The Goniometer35-phi offers a long travel range of 10°.


Position Sensing & Resolution: It features closed-loop control with position sensing. The product is capable of sensing up to 0.5 m° resolution.

Applications


  • Precision positioning

  • Microscopy

  • Optics and photonics research

  • Semiconductor manufacturing

  • Life science applications

  • Metrology and inspection systems

  • Work in a cryostat