Description
The OPTOMAN PP-UVFS-25.4-6.35-LLM290 is a premium deep-ultraviolet laser mirror engineered for demanding 193 nm ArF excimer laser systems. Manufactured from high-purity UV-grade fused silica (Corning 7980 0F) and coated using advanced Ion Beam Sputtering (IBS) technology, this mirror delivers greater than 98% reflectivity at a 45° angle of incidence while maintaining exceptional coating durability, low optical absorption, and outstanding long-term stability.
Designed for precision beam steering and beam folding, the mirror features λ/10 surface flatness, superior 10-5 scratch-dig surface quality, and a 22 mm clear aperture for excellent wavefront preservation in high-performance optical systems. Its robust IBS coating resists aging and optical degradation, making it an excellent choice for semiconductor manufacturing, DUV lithography, mask inspection, and scientific laser instrumentation requiring reliable operation under continuous UV exposure.
PP-UVFS-25.4-6.35-LLM290 193 nm Deep-UV Laser Mirror
Specifications
| Substrate Material: | UV Fused Silica |
|---|---|
| Diameter: | 25.4 mm |
| Thickness: | 6.35 mm |
| Wavelength Range: | 193 – 193 nm |
| Angle Of Incidence (AOI): | 45 – 45 deg |
| Surface Quality, S1 (scratch-dig): | 10-5 |
| Surface Quality, S2 (scratch-dig): | Inspection Polished |
| Surface Flatness Over CA, S1 (@633 Nm Or Per Manufacturer): | Lambda/10 |
| Surface Flatness Over CA, S2 (@633 Nm Or Per Manufacturer): | Unspecified |
| Parallelism: | 0.17 arcmin |
| S1 Surface: | Coated |
| S2 Surface: | Uncoated |
| Reflectivity (HRa @ AOI, @ Peak Wavelength): | 99.8 % |
| Manufacturer Part Number (MPN): | PP-UVFS-25.4-6.35-LLM290 |
| FindLight SKU: | FL-24535 |
Got questions about specs? Use the inquiry form to ask.
Download Data Sheet
Features
- Manufacturer Part Number: PP-UVFS-25.4-6.35-LLM290
- Optimized for 193 nm ArF DUV excimer lasers
- High reflectivity >98% at 193 nm, 45° angle of incidence
- Premium UV-grade fused silica (Corning 7980 0F) substrate
- Advanced Ion Beam Sputtering (IBS) dielectric coating for superior durability
- Excellent λ/10 surface flatness over any 15 mm diameter at 633 nm
- High optical quality with 10-5 scratch-dig polished optical surface
- 25.4 mm diameter with 6.35 mm thickness for easy integration
- 22 mm clear aperture for efficient beam transmission
- Low absorption, excellent environmental stability, and long coating lifetime
Applications
- ArF excimer laser beam steering
- Deep-UV optical beam folding systems
- Semiconductor photolithography
- Photomask writing equipment
- Wafer inspection systems
- High-resolution microfabrication
- Precision laser processing
- Scientific ultraviolet optical instruments
- Research laboratories utilizing DUV laser systems
- Industrial UV laser integration platforms
Export & Trade Information
| ECCN: | EAR99 |
|---|---|
| HTS Code: | 9001.90.6000 |
| Estimated US Tariff: | 10% |
Frequently Asked Questions
What wavelength is the PP-UVFS-25.4-6.35-LLM290 designed for?
Why is Ion Beam Sputtering (IBS) coating beneficial?
What optical quality does this mirror provide?
Which applications commonly use this laser mirror?
Can this DUV mirror operate under continuous industrial laser exposure?
Got more questions? Use the inquiry form to ask the supplier directly.
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