Description
The OPTOMAN PP-UVFS-25.4-3.0-LLM371 is a premium Deep-UV laser mirror engineered for demanding 193.4 nm ArF excimer laser applications. Manufactured from high-quality UV-grade fused silica (Corning 7980 0F) and coated using advanced Ion Beam Sputtering (IBS) technology, this mirror delivers exceptionally stable reflectivity, minimal optical absorption, and outstanding long-term durability in ultraviolet laser systems.
Designed for operation at 42°–48° angle of incidence, the mirror provides greater than 97.5% reflectivity (typically exceeding 98%) at 193.4 nm while maintaining excellent wavefront quality with λ/8 surface flatness over the clear aperture. IBS coatings eliminate coating aging and provide superior environmental stability compared to conventional deposition methods, making this optic ideal for high-average-power and high-repetition-rate excimer laser applications.
With a precision-polished 25.4 mm diameter substrate, laser-engraved orientation markings, and strict optical tolerances, the PP-UVFS-25.4-3.0-LLM371 is an excellent choice for semiconductor manufacturing, scientific research, photolithography, spectroscopy, and other ultraviolet optical systems requiring reliable long-term performance.
PP-UVFS-25.4-3.0-LLM371 Deep-UV Laser Mirror for 193.4 nm ArF Lasers
Specifications
| Substrate Material: | UV Fused Silica |
|---|---|
| Diameter: | 25.4 mm |
| Thickness: | 3 mm |
| Wavelength Range: | 193.4 – 193.4 nm |
| Angle Of Incidence (AOI): | 42 – 48 deg |
| Surface Quality, S1 (scratch-dig): | 20-10 |
| Surface Quality, S2 (scratch-dig): | Inspection Polished |
| Surface Flatness Over CA, S1 (@633 Nm Or Per Manufacturer): | Lambda/8 |
| Surface Flatness Over CA, S2 (@633 Nm Or Per Manufacturer): | Unspecified |
| Parallelism: | 1 arcmin |
| S1 Surface: | Coated |
| S2 Surface: | Uncoated |
| Reflectivity (HRa @ AOI, @ Peak Wavelength): | 97.5 % |
| Manufacturer Part Number (MPN): | PP-UVFS-25.4-3.0-LLM371 |
| FindLight SKU: | FL-24537 |
Got questions about specs? Use the inquiry form to ask.
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Features
- Manufacturer Part Number: PP-UVFS-25.4-3.0-LLM371
- Optimized for 193.4 nm ArF excimer lasers
- High-reflectivity IBS dielectric coating with R >97.5% (typically >98%)
- Designed for 42°–48° angle of incidence
- Premium UV-grade fused silica (Corning 7980 0F) substrate
- 25.4 mm diameter with 3 mm thickness
- λ/8 surface flatness at 633 nm over the clear aperture
- 20-10 scratch-dig optical surface qualit
- Â Low absorption and excellent environmental stability
- No coating aging for consistent optical performance over time
- Suitable for high repetition rate and high average power UV laser systems
- Laser-engraved orientation marking for simplified installation
Applications
- ArF excimer laser beam steering
- Deep-UV photolithography systems
- Semiconductor wafer processing
- Ultraviolet laser research laboratories
- Precision spectroscopy instrumentation
- Industrial UV laser machining
- Scientific optical assemblies
- High-energy laser beam delivery systems
- UV metrology and inspection equipment
- Custom OEM laser platforms
Export & Trade Information
| ECCN: | EAR99 |
|---|---|
| HTS Code: | 9001.90.6000 |
| Estimated US Tariff: | 10% |
Frequently Asked Questions
What wavelength is the PP-UVFS-25.4-3.0-LLM371 designed for?
Why are IBS coatings beneficial for Deep-UV laser mirrors?
What angle of incidence should be used?
Can this mirror be used in high-power ultraviolet laser systems?
Which industries commonly use this laser mirror?
Got more questions? Use the inquiry form to ask the supplier directly.
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