Description
The OPTOMAN PP-UVFS-12.7-3.0-LLM290 is a premium deep-UV dielectric laser mirror engineered for demanding 193 nm ArF excimer laser applications. Manufactured on a high-quality Corning 7980 UV fused silica substrate, this precision optic features an advanced Ion Beam Sputtered (IBS) high-reflectivity coating that delivers outstanding optical stability, low absorption, and exceptional durability under prolonged deep-ultraviolet exposure.
Optimized for 45° angle of incidence, the mirror provides greater than 98% reflectivity at 193 nm, making it an excellent choice for beam steering, beam folding, and optical routing in semiconductor manufacturing, photolithography, mask writing, and scientific research systems. The dense IBS coating resists environmental degradation and coating aging, ensuring reliable long-term performance even in contamination-sensitive DUV environments.
With excellent surface flatness, tight manufacturing tolerances, and superior optical quality, the PP-UVFS-12.7-3.0-LLM290 is designed for engineers and researchers requiring stable, repeatable performance in high-precision ultraviolet laser systems.
PP-UVFS-12.7-3.0-LLM290 193 nm Deep-UV IBS Laser Mirror
Specifications
| Substrate Material: | UV Fused Silica |
|---|---|
| Diameter: | 21.7 mm |
| Thickness: | 3 mm |
| Wavelength Range: | 193 – 193 nm |
| Angle Of Incidence (AOI): | 45 – 45 deg |
| Surface Quality, S1 (scratch-dig): | 20-10 |
| Surface Quality, S2 (scratch-dig): | Inspection Polished |
| Surface Flatness Over CA, S1 (@633 Nm Or Per Manufacturer): | Lambda/8 |
| Surface Flatness Over CA, S2 (@633 Nm Or Per Manufacturer): | Unspecified |
| Parallelism: | 0.17 arcmin |
| S1 Surface: | Coated |
| S2 Surface: | Uncoated |
| Reflectivity (HRa @ AOI, @ Peak Wavelength): | 98 % |
| Manufacturer Part Number (MPN): | PP-UVFS-12.7-3.0-LLM290 |
| FindLight SKU: | FL-24543 |
Got questions about specs? Use the inquiry form to ask.
Features
- Manufacturer Part Number: PP-UVFS-12.7-3.0-LLM290
- Optimized for 193 nm ArF excimer laser wavelength
- High reflectivity HR >98% at 193 nm
- Designed for 45° angle of incidence
- Premium UV Fused Silica (Corning 7980 0F) substrate
- Advanced Ion Beam Sputtered (IBS) dielectric coating for maximum durability
- Low absorption and excellent long-term coating stability
- Surface flatness < λ/8 @633 nm over any 10 mm diameter within the clear aperture
- Surface quality 20-10 Scratch-Dig (MIL-PRF-13830B)
- Parallelism <10 arcsec
- Precision manufactured for demanding deep-UV optical systems
- Uncoated rear surface for integration flexibility
Applications
- ArF excimer laser systems
- Semiconductor photolithography
- Photomask writing equipment
- Wafer inspection systems
- Deep-UV beam steering
- Precision beam folding
- High-resolution optical patterning
- UV laser research laboratories
- Scientific spectroscopy instrumentation
- Advanced industrial ultraviolet laser systems
Export & Trade Information
| ECCN: | EAR99 |
|---|---|
| HTS Code: | 9001.90.6000 |
| Estimated US Tariff: | 10% |
Frequently Asked Questions
What laser wavelength is this mirror designed for?
Why does this mirror use Ion Beam Sputtered (IBS) coatings?
Can this mirror be used for high-power UV laser systems?
What industries commonly use this optical mirror?
What are the advantages of UV fused silica as the substrate?
Got more questions? Use the inquiry form to ask the supplier directly.
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