Description

The OPTOMAN PP-UVFS-12.7-3.0-LLM290 is a premium deep-UV dielectric laser mirror engineered for demanding 193 nm ArF excimer laser applications. Manufactured on a high-quality Corning 7980 UV fused silica substrate, this precision optic features an advanced Ion Beam Sputtered (IBS) high-reflectivity coating that delivers outstanding optical stability, low absorption, and exceptional durability under prolonged deep-ultraviolet exposure.

Optimized for 45° angle of incidence, the mirror provides greater than 98% reflectivity at 193 nm, making it an excellent choice for beam steering, beam folding, and optical routing in semiconductor manufacturing, photolithography, mask writing, and scientific research systems. The dense IBS coating resists environmental degradation and coating aging, ensuring reliable long-term performance even in contamination-sensitive DUV environments.

With excellent surface flatness, tight manufacturing tolerances, and superior optical quality, the PP-UVFS-12.7-3.0-LLM290 is designed for engineers and researchers requiring stable, repeatable performance in high-precision ultraviolet laser systems.

PP-UVFS-12.7-3.0-LLM290 193 nm Deep-UV IBS Laser Mirror

Specifications

Substrate Material: UV Fused Silica
Diameter: 21.7 mm
Thickness: 3 mm
Wavelength Range: 193 – 193 nm
Angle Of Incidence (AOI): 45 – 45 deg
Surface Quality, S1 (scratch-dig): 20-10
Surface Quality, S2 (scratch-dig): Inspection Polished
Surface Flatness Over CA, S1 (@633 Nm Or Per Manufacturer): Lambda/8
Surface Flatness Over CA, S2 (@633 Nm Or Per Manufacturer): Unspecified
Parallelism: 0.17 arcmin
S1 Surface: Coated
S2 Surface: Uncoated
Reflectivity (HRa @ AOI, @ Peak Wavelength): 98 %
Manufacturer Part Number (MPN): PP-UVFS-12.7-3.0-LLM290
FindLight SKU: FL-24543

Got questions about specs? Use the inquiry form to ask.

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Features

  • Manufacturer Part Number: PP-UVFS-12.7-3.0-LLM290
  • Optimized for 193 nm ArF excimer laser wavelength
  • High reflectivity HR >98% at 193 nm
  • Designed for 45° angle of incidence
  • Premium UV Fused Silica (Corning 7980 0F) substrate
  • Advanced Ion Beam Sputtered (IBS) dielectric coating for maximum durability
  • Low absorption and excellent long-term coating stability
  • Surface flatness < λ/8 @633 nm over any 10 mm diameter within the clear aperture
  • Surface quality 20-10 Scratch-Dig (MIL-PRF-13830B)
  • Parallelism <10 arcsec
  • Precision manufactured for demanding deep-UV optical systems
  • Uncoated rear surface for integration flexibility

Applications

  • ArF excimer laser systems
  • Semiconductor photolithography
  • Photomask writing equipment
  • Wafer inspection systems
  • Deep-UV beam steering
  • Precision beam folding
  • High-resolution optical patterning
  • UV laser research laboratories
  • Scientific spectroscopy instrumentation
  • Advanced industrial ultraviolet laser systems

Export & Trade Information

ECCN: EAR99
HTS Code: 9001.90.6000
Estimated US Tariff: 10%

Importing, tariffs & codes (Quick Guide) →

Frequently Asked Questions

What laser wavelength is this mirror designed for?
The PP-UVFS-12.7-3.0-LLM290 is specifically optimized for 193 nm operation, making it ideal for ArF excimer laser systems used in deep-UV applications.
Why does this mirror use Ion Beam Sputtered (IBS) coatings?
IBS coatings create dense, highly durable dielectric layers with excellent reflectivity, low optical losses, outstanding environmental resistance, and long-term stability compared with many conventional coating methods.
Can this mirror be used for high-power UV laser systems?
Yes. Its low-loss IBS coating and UV fused silica substrate are designed to support demanding deep-UV laser applications where optical stability and coating durability are critical.
What industries commonly use this optical mirror?
Typical applications include semiconductor manufacturing, photolithography, wafer inspection, mask writing, precision microfabrication, and scientific research involving 193 nm excimer lasers.
What are the advantages of UV fused silica as the substrate?
UV fused silica offers excellent transmission in the ultraviolet spectrum, low thermal expansion, high laser damage resistance, and outstanding dimensional stability, making it an ideal material for precision deep-UV optical components.

Got more questions? Use the inquiry form to ask the supplier directly.

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