Scanner16-xy: The Smallest Low-Temperature Piezoelectric Scanner Stage

Specifications

Axes Of Motion: One
Travel Range: 0.03 mm
Load Capacity (Horizontal): 0.4 kg
Load Capacity (Vertical): Not Specified
Max Speed: Not Specified
Weight: 0.08 kg
Guiding Mechanism: Other
Voltage Requirement: Other
Scanning Axies: X, Y
Resolution: 0.5 nm
Linearity Error: Typical ~ 0.1 %
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Features

  • Compact design, dimensions: 16*16*7 mm
  • Ultra-high vacuum & very low temperature compatible: 2 E-11 mbar & 30 mK
  • Non-magnetic material Composed of pure Ti & BeCu, compatible with the 18 Tesla magnetic field
  • High loads: 100 g
  • Long travel range @300 K: 30*30 um
  • Position sensing up to 0.5 nm resolution

Applications

  • Precision positioning
  • Microscopy
  • Optics and photonics research
  • Semiconductor manufacturing
  • Life science applications
  • Metrology and inspection systems
  • Work in a cryostat