Beam Profiling And Beam Imaging For X-Ray 1-200 Nm
The goal of visualizing and measuring beams in the X-ray has taken on new importance. Star Tech Instruments has developed new systems to analyze these beams for Power/ Energy, Uniformity, High resolution Beam Profile and Image analysis.
Model µBIP10x is a vacuum compatible (1x10-10 Torr) Beam profiler and Beam Imaging system designed for high resolution at 1-10 nm. The system is useful to 200 nm. The 10x mag. field of 1.5 mm has a resolution of 0.6 µm and is sensitive to very low energy levels. The system has been designed for use with a 1.3 x 1.3” sensor but can be modified for other camera formats. Different magnifications and cameras are available upon request. The μBIP series is STI’s latest imaging system designed specifically for use with soft x-rays [1-2 nm]; it should not be used for longer wavelengths such as 193 nm or 248 nm from excimer lasers which would cause severe internal damage. Most importantly, the system is designed for use with high vacuum chambers using our custom vacuum flange assembly for attaching the optical system to the vacuum chamber. The flanges are rated at >10-8 Torr.
- Sensor Type: Other
- Measurable Sources: CW
- Wavelength Range: 1 - 200 nm
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- ADC: Other
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