MEMS Tilting Micro-Mirror
Description
MEMS Tilting Micro-Mirror.
MEMS Tilting Micro-Mirror
Specifications |
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Number Of Actuators: | 5 |
Wavefront Tip-Tilt Stroke (PtV): | 1.66 um |
Actuator Pitch: | -- um |
Pupil Size (Clear Aperture): | 1 mm |
Surface Quality (RMS): | -- nm |
Mechanical Response (10%-90%): | 1000 us |
Reflective Coating Material: | Gold, Aluminum |
Features
Single or dual axis tilting
Mirror size: Ø0.82, Ø1.0, Ø1.2, Ø1.5, Ø3.5 mm in diameter
Max. tilt angle range: X +/-7.5 deg., Y +/-2.5 deg.
Electrostatic actuation (quasi-static actuation); visually zero power consumption
For pricing, technical or any other questions please contact the supplier
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Frequently Asked Questions
The mirror is actuated using electrostatic actuation (quasi-static actuation) and has visually zero power consumption.
The mirror sizes available are Ø0.82, Ø1.0, Ø1.2, Ø1.5, and Ø3.5 mm in diameter.
A MEMS Tilting Micro-Mirror is a device that can tilt in one or two axes and is used for various applications such as laser beam steering, optical switching, and image projection.
The MEMS Tilting Micro-Mirror is hermetically sealed and has a durability of 10^9 cycles.
The maximum tilt angle range of the mirror is X +/-7.5 deg., Y +/-2.5 deg.