MEMS Tilting Micro-Mirror
|Number Of Actuators:||5|
|Wavefront Tip-Tilt Stroke (PtV):||1.66 um|
|Actuator Pitch:||-- um|
|Pupil Size (Clear Aperture):||1 mm|
|Surface Quality (RMS):||-- nm|
|Mechanical Response (10%-90%):||1000 us|
|Reflective Coating Material:||Gold, Aluminum|
Single or dual axis tilting
Mirror size: Ø0.82, Ø1.0, Ø1.2, Ø1.5, Ø3.5 mm in diameter
Max. tilt angle range: X +/-7.5 deg., Y +/-2.5 deg.
Electrostatic actuation (quasi-static actuation); visually zero power consumption
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