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Candela 8420 Optical Surface Analyzer
Description
The Candela® 8420 system serves the photonics, LED, commu- nications and other compound semiconductor markets. Candela 8420 uses classic Candela technology of multi-channel detection and rule-based defect binning to perform advanced inspection for determination of yield impacting defects on blanket wafers across multiple material systems. Standard Candela technology employs proprietary OSA (optical surface analyzer) architecture to simultaneously measure scatter intensity, topographic variations, surface reflectivity and phase shift for automatic detection and classification of a broad range of defects of interest (DOI).
Candela 8420 Optical Surface Analyzer
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