Coupling Platform Modules: |
Six-axis alignment system, Planar waveguide carrier, Vision module, UV curing module, Pressure sensing system, Stereo microscope module, Extinction ration tester, Software |
Extinction Ratio Wavelength Range: |
1260 – 1640 nm |
Extinction Ratio Measurement Range: |
Not Specified |
6-axis Alignment Resolution (X/Y/Z, θx/θyθz): |
0.03μm/0.03μm/0.03μm, 0.0001°/0.0001°/0.0001° |
Positioning Repeatability: |
≤±0.2μm |