Charged Particle Sources
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Vibration isolation systems are built to suppress the propagation of mechanical waves among different parts of equipment. Two approaches are developed to achieve this goal. The first one is passive isolation. It makes use of materials and structures that absorb mechanical waves, and some commonly seen passive isolation components are pneumatic isolators, springs, and pads/sheets made of flexible materials such as elastomers, rubber, cork, dense foam and laminate materials. The second method is active isolation. It embeds the mechanical system with a feedback circuit, which can sense the vibration signals and generate stronger counteracting forces. Active isolation systems are able to monitor vibrations with much higher precision, and today they are utilized where structures smaller than a micrometer have to be produced or measured.